2003
DOI: 10.1007/s00216-002-1667-2
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Analytical characterization of thin carbon films

Abstract: CH(x) films on silicon substrates deposited by a Mesh Hollow Cathode Process (MHC) were analyzed by various techniques. The films were produced with varying deposition times, resulting in thicknesses ranging from ~2-20 nm. X-Ray Reflectivity (XRR) was used to determine the film thicknesses and the deposition rate. A good correlation of measured XRR thicknesses with SIMS sputter depths down to the film-substrate transition was found. An AFM-based nanoscratching technique was applied to test the wear resistance … Show more

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Cited by 8 publications
(2 citation statements)
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“…Other groups have used similar AFM nanomachining techniques to determine the thickness of dendrimer monolayers (27) and spin-cast polymer thin films (28) and measure the wear resistance of thin carbon films (29), nanopatterning (30), and the plowing friction of thin polymer films (31). This is, to our knowledge, the first use for environmental samples.…”
Section: Methodsmentioning
confidence: 99%
“…Other groups have used similar AFM nanomachining techniques to determine the thickness of dendrimer monolayers (27) and spin-cast polymer thin films (28) and measure the wear resistance of thin carbon films (29), nanopatterning (30), and the plowing friction of thin polymer films (31). This is, to our knowledge, the first use for environmental samples.…”
Section: Methodsmentioning
confidence: 99%
“…It shows the possibility of chemical information as well as temperature and layer thickness determination [14]. Combined analysis of Raman peak position and intensity indicates a graphic structure for film thickness of less than 10 nm [15].…”
Section: Introductionmentioning
confidence: 88%