Analytical and Experimental Characterization of a Micromirror System

Pryputniewicz, Emily J.; Furlong, Cosme; Pryputniewicz, Ryszard J.

doi:10.1007/1-4020-4972-2_31

Cited by 5 publications

(8 citation statements)

References 16 publications

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“…Because of the nature of topics covered, the courses – taught at WPI as a part of the NEST Program – are based on an integrated use of analytical, computational and experimental solutions (ACES) methodology [19], which we find particularly suitable for development of MEMS [20, 53]. For example, the SUMMiT ® ‐V process enables fabrication of complex mechanical systems with intricate coupling mechanisms [12, 13, 53]. As stated in the , using SMM, the MEMS devices are batch‐fabricated, with no piece part assembly required, ready to use at the end of the fabrication process [18, 52].…”

Section: Mems Educationmentioning

confidence: 99%

“…Designers can develop their own designs from scratch, or build upon the Standard Components Library included in the tool set. The Standard Components Library is a library of basic components frequently used in the design of MEMS, Figure 19 [12, 52]. The standard components also serve as a teaching aid, allowing students/designers to learn design methods from example devices [59].…”

Section: Mems Educationmentioning

confidence: 99%

“…Fabrication of the micromirror system (Figure 2), including the electrostatic comb drives, gears (comprising MEMS engine, i.e. microengine), and the interconnecting linkages, requires four polysilicon layers [12]. These microengines are being developed to function at high rotational speeds (HRS): on the order of 1 000 000 (i.e.…”

Section: Introductionmentioning

confidence: 99%

“…one million) rpm [13]. Operational functionality of a micromirror system depends also on the quality of motions, especially of its hinged micromirror [12].…”

Section: Introductionmentioning

confidence: 99%

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Progress in Microelectromechanical Systems

Pryputniewicz

2007

Strain

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Recent advances in microelectromechanical systems (MEMS) technology have led to the development of a multitude of new devices heretofore impossible. However, applications of these devices are still hampered by challenges posed by their integration and packaging. The current trend in micro/nanosystems is to produce ever smaller, lighter and more capable devices at a lower cost than ever before. In addition, the finished products have to operate at very low power and in very adverse conditions while ensuring durable and reliable performance. Some of the new devices have been developed to function at high operational speeds, and others to make accurate measurements of operating conditions of specific processes. Regardless of their applications, the devices have to be packaged to facilitate their use. MEMS packaging, however, is application‐specific and, usually, has to be developed on a case‐by‐case basis. To facilitate advances of MEMS, educational programmes have been introduced addressing all aspects in their development. This paper addresses progress in MEMS by presenting pertinent aspects in a development of MEMS including, but not limited to, design, analysis, fabrication, characterisation, packaging, and testing. This presentation is illustrated with selected examples.

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Section: Mems Educationmentioning

confidence: 99%

Section: Mems Educationmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

“…one million) rpm [13]. Operational functionality of a micromirror system depends also on the quality of motions, especially of its hinged micromirror [12].…”

Section: Introductionmentioning

confidence: 99%

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Progress in Microelectromechanical Systems

Pryputniewicz

2007

Strain

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“…It shows better gloss and smoothness than ordinary spindle CaCO 3 , so it can partially replace flake kaolin which is increasingly scarce. Zhang et al [13] and Pryputniewicz et al [14] studied the influence of particle size on the toughening properties. They found that micro–nano composite CaCO 3 can improve the toughness of a material.…”

Section: Introductionmentioning

confidence: 99%

Study on preparation and structure of chrysanthemum‐shaped micron calcium carbonate based on inverse microemulsion

Zhao

et al. 2020

Micro & Nano Letters

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In this Letter, new chrysanthemum-shaped micrometre calcium carbonate was prepared by using CaCl 2 aqueous solution + NH 3 H 2 O + CTAB + n-butanol + n-hexane inverse microemulsion system. Scanning electron microscope, X-ray powder diffraction, and Fourier transform infrared spectroscopy were used to characterise the morphology and structure of the micron calcium carbonate. Further, the formation mechanism of chrysanthemum-shaped micron calcium carbonate was discussed.

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In-flight rotorcraft blade elastic twist sensor

Copp¹

2014

Smart Mater. Struct.

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A novel sensor network for measuring rotorcraft blade elastic twist in flight using an expansion of strain gage theory is proposed and demonstrated. The embedded sensor has negligible weight, small power draw, high bandwidth (≥100 kHz), works in the high centrifugal force environment of the rotating blade and does not disturb the blade airflow or structure. The sensor network can also be used to measure lead–lag and flap bending. The blade is idealized as an Euler–Bernoulli beam in bending and a rod in torsion. The theory is rigorously derived from first principles and shows that a sawtooth shaped sensor will measure twist directly without any numerical integration. The network is modeled computationally for a blade undergoing arbitrary torsional and bending moments. The model shows the twist sensor is not affected by arbitrary loading or noise or local structural discontinuities. The twist sensor is then embedded in a Mach scale rotor blade. The elastic twist measurement from the sensor exactly matched the actual twist angle on the benchtop for small (±0.08°), moderate (±0.3°) and large (±2.5°) elastic twist angles over a 4.6 in span (16% of total span). For the large twist deflections, the blade also had flap bending deflections of ±0.34 in (±7% of span).

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Analytical and Experimental Characterization of a Micromirror System

Cited by 5 publications

References 16 publications

Progress in Microelectromechanical Systems

Progress in Microelectromechanical Systems

Study on preparation and structure of chrysanthemum‐shaped micron calcium carbonate based on inverse microemulsion

In-flight rotorcraft blade elastic twist sensor

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