1998
DOI: 10.1016/s0040-6090(97)00799-2
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Analytic representations of the dielectric functions of materials for device and structural modeling

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Cited by 95 publications
(60 citation statements)
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References 13 publications
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“…Instead, it can be approximated using multiple Debye, Drude, Lorentz [1], or critical point [5] terms of the form …”
mentioning
confidence: 99%
See 1 more Smart Citation
“…Instead, it can be approximated using multiple Debye, Drude, Lorentz [1], or critical point [5] terms of the form …”
mentioning
confidence: 99%
“…More flexible fitting (some of which is captured in the critical point model [5]), is enabled by additional terms proportional to −iω n in both numerators and denominators of (2). In the numerator, they describe direct polarization of the medium by time derivatives of the applied electric field.…”
mentioning
confidence: 99%
“…Throughout the calculation, we use the data [9] available in the existing literature for the dispersion of the permittivity of silicon [10], silicon oxide [11] and silicon carbide [12]. With reference to Fig.…”
mentioning
confidence: 99%
“…Effectiveness in suppressing endpoint-discontinuity effects is indicated by the values of n at which the dependences diverge from the information [12], obtained as a piecewise-continuous, Kramers-Kronig-consistent set of analytic functions determined self-consistently from data for oxidized (001)Si samples covering a range of oxide thicknesses with assumptions made about the Si±SiO 2 interface. We also investigate the fully analytic 4-oscillator, 21-parameter representation of Leng et al [13], whose parameters were determined by fitting to the results of [10]. The data of [8, 10, and 12] were obtained with rotating-analyzer ellipsometers, while those of [9] were obtained with a photoelastic-modulator system.…”
Section: Application To Crystalline Simentioning
confidence: 99%
“…We consider only he 1 i. The spectra analyzed either consist of 250 data points equally spaced in energy from 1.5 to 6.0 eV ( [8,10]), were projected onto these energies by linear interpolation of published tables ( [9,12]), or were evaluated directly at these energies from the published analytic function ( [13]). We analyzed the segment extending from j 1 80 through j 2 130 inclusive, which corresponds to energies of 2.9277 and 3.8313 eV, respectively.…”
Section: Application To Crystalline Simentioning
confidence: 99%