Analytic evaluation of the intensity point spread function

Gallatin, Gregg M.

doi:10.1116/1.1324617

Cited by 6 publications

(3 citation statements)

References 7 publications

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“…A 2.5. Axial symmetry method for calculating the intensity point spread function is de rived by Gallatin [32]. In this section, we give an alternative deriva tion which is consistent with the foregoing analysis, and leads to the same result obtained by Gallatin.…”

Section: Intensity Point Spread Functionsupporting

confidence: 78%

Charged Particle Optics Theory

Groves¹

2017

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Cover picture: A monatomically thick graphene layer, viewed in a Nion UltraSTEM200 aberration-corrected scanning transmission electron microscope (STEM) located at the Oak Ridge National Laboratory. The microscope was operated at 60 KV in annular dark field (ADF) mode. The red regions represent individual carbon atoms with nearest-neighbor spacing of 0.14 nm. The red regions represent the highest scattered intensity, and the blue regions represent the lowest scattered intensity. The image is a sum of intensities of 350 separate areas of a single graphene specimen, each having 128×128 pixels. Each individual scan is translated so as to maximize the cross-correlation function between separate scans. This greatly reduces noise in the composite image. The original image and specimen were prepared by Dr. Florence Nelson, and the correlation analysis was performed by Jennifer Passage.

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Section: Intensity Point Spread Functionsupporting

confidence: 78%

Charged Particle Optics Theory

Groves¹

2017

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“…tem optimization to be performed with greater speed and insight. 14,15 In the meantime numerical analysis of spacecharge effects has advanced to the point where the mutual interactions of the electrons can be accurately calculated in the presence of realistic lens fields. 16 In the near future these comprehensive models will allow for system optimization in terms of lithographic performance based on a detailed understanding of the imaging behavior of the optics at beam currents meaningful for high-throughput tools.…”

Section: Modeling Of Space-charge Effectsmentioning

confidence: 99%

Space-charge effects in projection electron-beam lithography: Results from the SCALPEL proof-of-lithography system

Liddle¹,

Blakey²,

Bolan³

et al. 2001

Journal of Vacuum Science &Amp; Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena

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Articles you may be interested inPerformances by the electron optical system of low energy electron beam proximity projection lithography tool with a large scanning field J. Vac. Sci. Technol. B 23, 2754 (2005; 10.1116/1.2062435 Stochastic Coulomb interaction effect in ion-neutralized electron-beam projection opticsElectron optical image correction subsystem in electron beam projection lithography Scaled measurements of global space-charge induced image blur in electron beam projection systemIn projection electron-beam systems resolution and throughput are linked through electron-electron interactions collectively referred to as space-charge effects. Hence, a detailed understanding of these effects is essential to optimizing the lithographic performance of a projection electron-beam lithography system. Although many models have been developed to describe one or more of the various aspects of the Coulomb interactions that occur in the beam, there is minimal experimental data available. We have performed a series of experimental measurements in the scattering with angular limitation projection electron-beam lithography ͑SCALPEL͒ proof-of-lithography system to characterize the space-charge effects for such an optical configuration. The results of those measurements have been compared to a combination of computer simulations and analytical models. The agreement between the models and experiments was good, within the limits of experimental error. We determined the exponent in the dependence of blur on beam current to be 1.029Ϯ0.16 ͑1͒, consistent with more recent models. Additionally, we comment on the use of blur modeling for system optimization.

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“…PSFs for specific scenarios in passive radar and medical imaging are presented in [8,9]. In [10,11], analytical solutions are derived for a projection electron system and a Doppler radar. To characterize the imaging procedure for solving a full vectorial inverse problem using the concept of PSFs, it is necessary to define the PSFs in a dyadic fashion, cf.…”

Section: Introductionmentioning

confidence: 99%

Dyadic Point Spread Functions for 3d Inverse Source Imaging Based on Analytical Integral Solutions

Schnattinger¹,

Eibert²

2014

PIER B

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Imaging is a valuable tool for solving inverse source problems. The achievable image quality is determined by the imaging system. Its performance can be evaluated by using the concept of point spread functions (PSFs). It is common to compute the PSFs using a numerical algorithm. However, in some cases the PSFs can be derived analytically. In this work, new analytical PSFs are presented. The results apply to scalar and dyadic scenarios in 3D originating from acoustics and electromagnetics. Data sets with narrow angular acquisition or complete spherical coverage are considered, where broadband and narrowband frequency domain data is supported. Several visualizations accompany the resulting formulas. Finally, the analytical PSFs are verified using a numerical implementation of the imaging process.

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Analytic evaluation of the intensity point spread function

Cited by 6 publications

References 7 publications

Charged Particle Optics Theory

Charged Particle Optics Theory

Space-charge effects in projection electron-beam lithography: Results from the SCALPEL proof-of-lithography system

Dyadic Point Spread Functions for 3d Inverse Source Imaging Based on Analytical Integral Solutions

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