Analysis on the influence of several parameters in physical resist models

Wang, Jiashuo; Kong, Pengjie; Dong, Lisong; Wei, Yayi

doi:10.1109/iwaps54037.2021.9671255

2021 International Workshop on Advanced Patterning Solutions (IWAPS) 2021

DOI: 10.1109/iwaps54037.2021.9671255

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Analysis on the influence of several parameters in physical resist models

Jiashuo Wang

Pengjie Kong

Lisong Dong

et al.

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Analysis on the influence of several parameters in physical resist models

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References 6 publications

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