Analysis on Chattering Phenomena by the Tilt of the Proof Mass in MEMS Switch

Abstract

Abstract:This paper reports an analysis on the relationship between the tilt of the proof mass in MEMS switch and the chattering phenomena. Low-g MEMS acceleration switch developed by Kim's group was modelled in 2D and displacements of each end of the proof mass were analysed using RK 4th method. Some elementary assumptions were made to ease the modelling and analysis. The chattering time of the MEMS switch gets longer as the tilt of the proof mass increases. The reason is that the elongated travel distance of one end of proof mass increases the impact velocity and lengthens the bouncing back time. From the results, we found that the chattering phenomena can last very long even if the tilt of the proof mass is very small.