1997
DOI: 10.1016/s0925-4005(97)00152-4
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Analysis of VOCs with a tin oxide sensor array

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Cited by 54 publications
(27 citation statements)
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“…The tin oxide thin films are grown by reactive sputtering from a SnO 2 target under a 10:90 oxygen-argon mixture. A detailed description of the complete procedure for the preparation of the sensors has been reported elsewhere [13,14]. Deposition conditions have been fixed during the sputtering process (independently of the target used) and are as follows: substrate holder temperature 250 • C, plasma pressure 0.5 Pa, acceleration voltage 500 V, radio frequency power 100 W. Some of the sensors have been doped with different amounts of Cr and In, by changing the deposition time during the sputtering process.…”
Section: Multisensor Preparationmentioning
confidence: 99%
“…The tin oxide thin films are grown by reactive sputtering from a SnO 2 target under a 10:90 oxygen-argon mixture. A detailed description of the complete procedure for the preparation of the sensors has been reported elsewhere [13,14]. Deposition conditions have been fixed during the sputtering process (independently of the target used) and are as follows: substrate holder temperature 250 • C, plasma pressure 0.5 Pa, acceleration voltage 500 V, radio frequency power 100 W. Some of the sensors have been doped with different amounts of Cr and In, by changing the deposition time during the sputtering process.…”
Section: Multisensor Preparationmentioning
confidence: 99%
“…The tin oxide thin films are grown by reactive sputtering from SnO 2 target under 10:90 oxygen-argon mixture. A detailed description of the complete procedure for the preparation of the sensors has been reported elsewhere [12,13]. Deposition conditions have been fixed during the sputtering process (independent of the target used) and are as follows: substrate holder temperature 250 • C, plasma pressure 0.5 Pa, acceleration voltage 500 V and radiofrequency power 100 W. Some of the sensors have been doped with different amounts of Cr and In, by changing the deposition time during the sputtering process.…”
Section: Fabrication Of Sno 2 Thin Film Sensor Arraymentioning
confidence: 99%
“…Otherwise it has been demonstrated that the presence of benzene in the soil may be an indicator of environmental contamination [2][3][4]. Researchers and engineers use gas chromatographic (GC) devices, sensitive enough to detect benzene in the near surface layers of the earth, to predict the presence of oil reservoirs.…”
Section: Introductionmentioning
confidence: 99%