2018
DOI: 10.1007/s00542-018-3866-6
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Analysis of uniform structured RF MEMS switch with different uniform and non-uniform meandering techniques

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Cited by 4 publications
(1 citation statement)
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“…MEMS(Microelectromechanical systems) is one of the most promising technologies in which several mechanical devices like sensors, actuators, transducers implanted in semiconductor chips are consolidated with computers [1]. The attractive features of MEMS devices are: they are interdisciplinary in nature, exhibits batch production, less expensive, highly miniaturized structure, highly reliable, better performance than other available technologies.…”
Section: Introductionmentioning
confidence: 99%
“…MEMS(Microelectromechanical systems) is one of the most promising technologies in which several mechanical devices like sensors, actuators, transducers implanted in semiconductor chips are consolidated with computers [1]. The attractive features of MEMS devices are: they are interdisciplinary in nature, exhibits batch production, less expensive, highly miniaturized structure, highly reliable, better performance than other available technologies.…”
Section: Introductionmentioning
confidence: 99%