Analysis of tip deflection and force of a bimetallic cantilever microactuator

Chu, Wujin; Mehregany, Mehran; Mullen, Robert L.

doi:10.1088/0960-1317/3/1/002

Cited by 223 publications

(136 citation statements)

References 6 publications

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“…The iso-voltage curves do not exhibit a linear behaviour: this was reported elsewhere for macro-scale actuators [13,14]. The maximum blocking force can be approximated, by linear extrapolation from the stiffest force versus displacement curve, at about 0.25 mN at 10 V and 0.12 mN at 5 V. Assuming a linear behaviour of the iso-voltage curves would lead to a higher value of blocking force (i.e.…”

Section: Force and Displacement Measurements Using The Calibrated Forsupporting

confidence: 53%

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Characterisation of PZT thin film micro-actuators using a silicon micro-force sensor

Duval

Wilson

Ensell³

et al. 2007

Sensors and Actuators A: Physical

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This paper reports on the measurements of displacement and blocking force of piezoelectric micro-cantilevers. The free displacement was studied using a surface profiler and a laser vibrometer. The experimental data were compared with an analytical model which showed that the PZT thin film has a Young's modulus of 110 GPa and a piezoelectric coefficient d 31,f of 30 pC/N. The blocking force was investigated by means of a micro-machined silicon force sensor based on the silicon piezoresistive effect. The generated force was detected by measuring a change in voltage within a piezoresistors bridge. The sensor was calibrated using a commercial nano-indenter as a force and displacement standard. Application of the method showed that a 700 m long micro-cantilever showed a maximum displacement of 800 nm and a blocking force of 0.1 mN at an actuation voltage of 5 V, within experimental error of the theoretical predictions based on the known piezoelectric and elastic properties of the PZT film.

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Section: Force and Displacement Measurements Using The Calibrated Forsupporting

confidence: 53%

“…It is common practice to estimate the blocking force knowing the moment of inertia, I and the maximum displacement (Eq. (1)) [13].…”

Section: Introductionmentioning

confidence: 99%

Characterisation of PZT thin film micro-actuators using a silicon micro-force sensor

Duval

Wilson

Ensell³

et al. 2007

Sensors and Actuators A: Physical

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show abstract

“…In the heat tests, upon temperature change, the biphasic lC deflects due to the bending moment generated by the different thermal expansions of the two materials [11,20]. We have shown that PP lCs with a thin gold film on one side undergo measurable bending in response to temperature changes.…”

Section: Discussionmentioning

confidence: 88%

Nano-Mechanical Transduction of Polymer Micro-Cantilevers to Detect Bio-Molecular Interactions

et al. 2012

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Using variothermal polymer micro-injection molding, disposable arrays of eight polymer micro-cantilevers each 500 μm long, 100 μm wide and 25 μm thick were fabricated. The present study took advantage of an easy flow grade polypropylene. After gold coating for optical read-out and asymmetrical sensitization, the arrays were introduced into the Cantisens® Research system to perform mechanical and functional testing. We demonstrate that polypropylene cantilevers can be used as biosensors for medical purposes in the same manner as the established silicon ones to detect single-stranded DNA sequences and metal ions in real-time. A differential signal of 7 nm was detected for the hybridization of 1 μM complementary DNA sequences. For 100 nM copper ions the differential signal was found to be (36 ± 5) nm. Nano-mechanical sensing of medically relevant, nanometer-size species is essential for fast and efficient diagnosis.

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“…A typical MLL lens is 1 mm x 1 mm x 50 µm which yields the weight on the order of 0.15 mg. An alignment system would then have to provide adequate strength to support this weight and also have feedback mechanism that would ensure the requisite angular stability. Several MEMS driving and sensing solutions are available for these purposes, including thermal drivers, 15 electromagnetic drivers, 16 parallel plate electrostatic drivers 17 and electrostatic comb drivers. [17][18][19][20][21] One option for position feedback is piezoresistive sensing, which is easy to implement but is susceptible to ambient temperature fluctuations.…”

mentioning

confidence: 99%

Performance and characterization of a MEMS-based device for alignment and manipulation of x-ray nanofocusing optics

Lauer

Yan

et al. 2015

AIP Advances

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X-ray microscopy is a powerful, non-invasive tool used for nanometer-scale resolution imaging, and it is widely applied in various areas of science and technology. To push the spatial resolution of x-ray microscopy studies in the hard x-ray regime below 10 nm, Multilayer Laue Lenses (MLL) can be used as nanofocusing elements. To ensure distortion-free x-ray imaging, high-stability microscopy systems are required. MEMS-based manipulators are a promising route to achieve high stability when used for alignment and manipulation of nanofocusing optics. In this work, we present a tip-tilt MEMS-based device suitable for MLL alignment. We fully characterize the device and demonstrate better-than 10 millidegree angular positioning resolution when utilizing capacitive displacement sensors, and better-than 0.8 millidegree resolution when using laser interferometry.

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Analysis of tip deflection and force of a bimetallic cantilever microactuator

Cited by 223 publications

References 6 publications

Characterisation of PZT thin film micro-actuators using a silicon micro-force sensor

Characterisation of PZT thin film micro-actuators using a silicon micro-force sensor

Nano-Mechanical Transduction of Polymer Micro-Cantilevers to Detect Bio-Molecular Interactions

Performance and characterization of a MEMS-based device for alignment and manipulation of x-ray nanofocusing optics

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