Analysis of thermoelastic damping in microresonators by considering the stretching effect

Zamanian, M.; Khadem, S.E.

doi:10.1016/j.ijmecsci.2010.07.001

Cited by 33 publications

(10 citation statements)

References 15 publications

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“…Nonlinearity plays a major role at the micron scale; it usually arises from sources, such as squeeze-film damping, electrostatic actuation, large deflections (geometric nonlinearities), and intermolecular forces such as Casimir or van der Waals [16] present at submicron scales. The minimization of damping is an essential requirement in the design of micro resonators, which constitutes a major factor of energy dissipation in such systems [17]. The AC voltage produces an electrostatic force, which is nonlinear and parametric, exciting the MEMS resonator.…”

Section: Introductionmentioning

confidence: 99%

Reduced Order Model Analysis of Frequency Response of Alternating Current Near Half Natural Frequency Electrostatically Actuated MEMS Cantilevers

Caruntu¹,

Martinez²,

Knecht

2012

Journal of Computational and Nonlinear Dynamics

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This paper uses the reduced order model (ROM) method to investigate the nonlinear-parametric dynamics of electrostatically actuated microelectromechanical systems (MEMS) cantilever resonators under soft alternating current (AC) voltage of frequency near half natural frequency. This voltage is between the resonator and a ground plate and provides the actuation for the resonator. Fringe effect and damping forces are included. The resonator is modeled as a Euler-Bernoulli cantilever. ROM convergence shows that the five terms model accurately predicts the steady states of the resonator for both small and large amplitudes and the pull-in phenomenon either when frequency is swept up or down. It is found that the MEMS resonator loses stability and undergoes a pull-in phenomenon (1) for amplitudes about 0.5 of the gap and a frequency less than half natural frequency, as the frequency is swept up, and (2) for amplitudes of about 0.87 of the gap and a frequency about half natural frequency, as the frequency is swept down. It also found that there are initial amplitudes and frequencies lower than half natural frequency for which pull-in can occur if the initial amplitude is large enough. Increasing the damping narrows the escape band until no pull-in phenomenon can occur, only large amplitudes of about 0.85 of the gap being reached. If the damping continues to increase the peak amplitude decreases and the resonator experiences a linear dynamics like behavior. Increasing the voltage enlarges the escape band by shifting the sweep up bifurcation frequency to lower values; the amplitudes of losing stability are not affected. Fringe effect affects significantly the behavior of the MEMS resonator. As the cantilever becomes narrower the fringe effect increases. This slightly enlarges the escape band and increases the sweep up bifurcation amplitude. The method of multiple scales (MMS) fails to accurately predict the behavior of the MEMS resonator for any amplitude greater than 0.45 of the gap. Yet, for amplitudes less than 0.45 of the gap MMS predictions match perfectly ROM predictions.

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Section: Introductionmentioning

confidence: 99%

Reduced Order Model Analysis of Frequency Response of Alternating Current Near Half Natural Frequency Electrostatically Actuated MEMS Cantilevers

Caruntu¹,

Martinez²,

Knecht

2012

Journal of Computational and Nonlinear Dynamics

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“…When heating occurs before that the microswitch is actuated thermal effects and residual stress affect simultaneously the pull-in voltage, so as static and dynamic responses of microbridge are significantly changed (Zamanian 2010). If temperature increases all around the RF-MEMS, a uniform dilatation of the microbeam is excited, but is inhibited by the clamps.…”

Section: Heating Of Electromechanically Uncoupled Microsystemmentioning

confidence: 99%

“…Interaction between electromechanical actions and environmental fluid surrounding the MEMS was evenly analysed (Veijola et al 2009). Only recently research activities were focused on the temperature role in microswitch functionality and reliability (Hasiang Pan 2002;Nieminen et al 2004;Zhu and Espinosa 2004;Goldsmith 2005;Kang 2005;Rezvanian 2008;Bognar 2009;Yan 2009;Mahameed 2010;Saeedivahdat 2010;Zamanian 2010). Unfortunately, conclusions and remarks are still in contrast each other.…”

Section: Introductionmentioning

confidence: 99%

“…Some particular conditions motivate a poor dependence upon temperature, which was monitored at least at the very beginning of the heating process (Yan 2004). Several authors are prone to consider a decreased pull-in voltage for higher values of temperature (Zhu 2004;Goldsmith 2005;Zamanian 2010). Some uncertainties were found even in pull-out prediction.…”

Section: Introductionmentioning

confidence: 99%

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Role of the electro-thermo-mechanical multiple coupling on the operation of RF-microswitch

Brusa

Munteanu

2012

Microsyst Technol

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A phenomenological approach is proposed to identify some effects occurring within the structure of the microswitch conceived for radio frequency application. This microsystem is operated via a nonlinear electromechanical action imposed by the applied voltage. Unfortunately, it can be affected by residual stress, due to the microfabrication process, therefore axial and flexural behaviors are strongly coupled. This coupling increases the actuation voltage required to achieve the so-called ''pull-in'' condition. Moreover, temperature may strongly affect strain and stress distributions, respectively. Environmental temperature, internal dissipation of material, thermo-elastic and Joule effects play different roles on the microswitch flexural displacement. Sometimes buckling phenomenon evenly occurs. Literature show that all those issues make difficult an effective computation of ''pull-in'' and ''pull-out'' voltages or evenly distinguishing the origin of some failures detected in operation. Analysis, numerical methods and experiments are applied to an industrial test case to investigate step by step the RF-microswitch operation. Multiple electro-thermomechanical coupling is first modeled to have a preliminary and comprehensive description of the microswitch behavior and of its reliability. ''Pull-in'' and ''pull-out'' tests are then performed to validate the proposed models and to find suitable criteria to design the RF-MEMS.

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“…Recently, Lifshitz and Roukes [8] studied exact solution of thermoelastic dissipation for resonator beams of thin rectangular cross section, and their results showed that the simplified classical results of Zener [10,11] is very close to the exact solution under reasonably fair conditions. Their study has stimulated a renewed interest on thermoelastic dissipation of beam resonators [14][15][16][17][18][19][20][21][22][23], with a specific concern about small scale effects of thermoelastic dissipation. Very recently, an analysis of thermoelastic dissipation for hollow tubular beam resonators has been offered by Tunvir et al [24] where a hollow circular cross-section is found to be superior over solid circular cross-section in many cases, in order to achieve higher quality factor.…”

Section: Introductionmentioning

confidence: 99%

Effect of cross-sectional shape on thermoelastic dissipation of micro/nano elastic beams

Tunvir

Mioduchowski

2012

International Journal of Mechanical Sciences

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Analysis of thermoelastic damping in microresonators by considering the stretching effect

Cited by 33 publications

References 15 publications

Reduced Order Model Analysis of Frequency Response of Alternating Current Near Half Natural Frequency Electrostatically Actuated MEMS Cantilevers

Reduced Order Model Analysis of Frequency Response of Alternating Current Near Half Natural Frequency Electrostatically Actuated MEMS Cantilevers

Role of the electro-thermo-mechanical multiple coupling on the operation of RF-microswitch

Effect of cross-sectional shape on thermoelastic dissipation of micro/nano elastic beams

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