2006
DOI: 10.1134/s0030400x06080017
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Analysis of the spectra of In XII–XIV and Sn XIII–XV in the far-VUV region

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Cited by 55 publications
(71 citation statements)
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“…The spectra reported in this article are relevant to the verification of the identifications of the EUV spectra of Sn ions [9,10] which are used as a "fuel" in the radiation sources for the projection lithography at the 135 Å wavelength. The previous analyses in [9,10] were performed without any isoelectronic or isoionic support.…”
Section: Discussionmentioning
confidence: 99%
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“…The spectra reported in this article are relevant to the verification of the identifications of the EUV spectra of Sn ions [9,10] which are used as a "fuel" in the radiation sources for the projection lithography at the 135 Å wavelength. The previous analyses in [9,10] were performed without any isoelectronic or isoionic support.…”
Section: Discussionmentioning
confidence: 99%
“…The previous analyses in [9,10] were performed without any isoelectronic or isoionic support. The isoelectronic sequence Rh VIII-Cd XI was recently studied in [7].…”
Section: Discussionmentioning
confidence: 99%
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“…Recently the probabilities of transitions (2) at N = 2 for Sn 12+ have been calculated semiempirically, taking into account configurations 4p 6 4d nl (n ≤ 6, l = s, p, d, f ), 4p 5 4d 3 , 4p 6 5s 2 , 4p 5 4d 2 5s and scaling down various integrals to different extent [17]. These results have been used for the identification of about seventy lines in the vacuum spark spectrum.…”
Section: Resultsmentioning
confidence: 99%
“…The strong peak in tin emission over the range 130-140 Å consists of 4p 6 4d m -(4p 6 4d m−1 5p + 4p 6 4d m−1 4f + 4p 5 4d m+1 ) transitions in several spectra ranging from Sn X (m = 5) to Sn XV (m = 0). The most intense lines in these highly ionized tin spectra were identified [1,2] using the energy parameter interpolation along the isonuclear Sn VI-VIII, Sn XIV sequence in the framework of the Cowan code calculations [3]. The identification of such complex transitions should be confirmed by a comparison with the spectra of similar transitions in the isoelectronic ions of neighbouring elements, which are mostly unknown.…”
Section: Introductionmentioning
confidence: 99%