Analysis of the Problems of the Research and Modernization of Emission Units of Analytical Devices of Vacuum Electronics

Abstract

In various electron-optical and ion-beam devices and vacuum electronics installations, emission elements and units are used to extract and form beams of charged particles. Their focusing properties significantly affect the quality parameters and technical characteristics of the analytical devices and technological installations in which they are used. Due to the specificity of the initial conditions during the formation of the beams of charged particles in the area of charged particle extraction, the methods of studying single and conventional immersion electron lenses are not suitable for the high quality theoretical and numerical studies of the properties of immersion objectives. In this paper, theoretical and numerical studies were conducted on the problems in analyzing the focusing parameters of charged particles in emission elements and units when solving problems of designing and upgrading devices and installations of vacuum electronics. As a result of the studies, a theoretical method for studying cathode lenses with a curved optical axis was developed and options for solving problems in correcting aberrations of emission elements and units were proposed.