Analysis of the Electrophysical Characteristics of the RF MEMS Switch Taking into Account the Influence of the Substrate Material

Dryagin, I. O.; Belevtsev, A. M.; Epaneshnikova, I. K.; Kryuchkov, V. L.; Lukichev, V. F.

doi:10.1134/s1063739723600449

Russ Microelectron

2023

DOI: 10.1134/s1063739723600449

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Analysis of the Electrophysical Characteristics of the RF MEMS Switch Taking into Account the Influence of the Substrate Material

I. O. Dryagin,

A. M. Belevtsev,

I. K. Epaneshnikova

et al.

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Analysis of the Electrophysical Characteristics of the RF MEMS Switch Taking into Account the Influence of the Substrate Material

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References 4 publications

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