Analysis of the Electrode Products Emitted by dc Arcs in a Vacuum Ambient

Journal of Applied Physics

2009

Short-pulse, high-current discharges in vacuum were investigated with the goal to maximize the ion charge state number. In a direct extension of previous work [Appl.Phys. Lett. 92, 041502 (2008)], the role of pulse length, rate of current rise, and current amplitude was studied. For all experimental conditions, the usable (extractable) mean ion charge state could not be pushed beyond 7+. Instead, a maximum of the mean ion charge state (about 6+ to 7+ for most cathode materials) was found for a power of 2-3 MW dissipated in the discharge gap. The maximum is the result of two opposing processes that occur when the power is increased: (i) the formation of higher ion charge states, and (ii) a greater production of neutrals (both metal and non-metal), which reduces the charge state via charge exchange collisions.2

Section: Methodsmentioning

confidence: 99%

“…[1][2][3][4][5] The charge states can be shifted higher by a number of measures like the application of a magnetic field. 6,7 This was shown to be related to greater power dissipation because the burning voltage of the discharge, measured between anode and cathode, is greatly enhanced.…”

Section: Introductionmentioning

confidence: 99%

Physical limits for high ion charge states in pulsed discharges in vacuum

Yushkov

Journal of Applied Physics

2009

“…A comparison to literature data [29] is added to the table, which shows the voltage ( * V arc ) and current ( * I arc ) of 250 μs arc pulses from Nb and Al cathodes, averaged over 16 pulses in the time interval from 150 to 250 μs and additionally corrected by the voltage drop in the circuit. It should be noted that different currents in that magnitude have only a slight influence on arc voltage [30].…”

Section: Arc Current and Voltagementioning

confidence: 99%

Time-resolved ion energy and charge state distributions in pulsed cathodic arc plasmas of Nb−Al cathodes in high vacuum

Zöhrer

Plasma Sources Sci. Technol.

Franz

2018

Cathodic arcs have been utilized in various applications including the deposition of thin films and coatings, ion implantation, and high current switching. Despite substantial progress in recent decades, the physical mechanisms responsible for the observed plasma properties are still a matter of dispute, particularly for multi-element cathodes, which can play an essential role in applications. The analysis of plasma properties is complicated by the generally occurring neutral background of metal atoms, which perturbs initial ion properties. By using a time-resolved method in combination with pulsed arcs and a comprehensive Nb−Al cathode model system, we investigate the influence of cathode composition on the plasma, while making the influence of neutrals visible for the observed time frame. The results visualize ion detections of 600 μs plasma pulses, extracted 0.27 m from the cathode, resolved in mass-per-charge, energy-per-charge and time. Ion properties are found to be strongly dependent on the cathode material in a way that cannot be deduced by simple linear extrapolation. Subsequently, current hypotheses in cathodic arc physics applying to multi-element cathodes, like the so-called 'velocity rule' or the 'cohesive energy rule', are tested for early and late stages of the pulse. Apart from their fundamental character, the findings could be useful in optimizing or designing plasma properties for applications, by actively utilizing effects on ion distributions caused by composite cathode materials and charge exchange with neutrals.

“…For example, one can find data on average ion charge states 10,19 , average burning voltages 20,21 , average ion velocities 15 , or average ion velocity distribution functions 22 .…”

Section: Lbnl-57025mentioning

confidence: 99%

“…Much research, both theoretically 2-7 and experimentally [8][9][10][11][12][13][14] , has been done for decades to understand the spot phenomena that produce non-equilibrium plasmas containing multiply ion charge states. The plasma is mesosonic 15 ,…”

Section: Lbnl-57025mentioning

confidence: 99%

Cathodic arcs: Fractal voltage and cohesive energy rule

Applied Physics Letters

Окс

Yushkov

2005

The noise of the burning voltage of cathodic arcs in vacuum was analyzed for a range of cathode materials (C, Mg, Ti, V, Ni, Cu, Zr, Nb, Ag, Hf, Ta, W, Pt, Bi, and Si). Cathodic arcs were generated in a coaxial plasma source, and the voltage noise was measured with a broadband (250 MHz) measuring system. Each measurement of 50,000 points was analyzed by Fast Fourier Transform, revealing a power spectrum ~ 1/f 2 for all metals over several orders of magnitude of frequency f (brown noise). The absence of any characteristic time down to possible cutoffs at high frequencies supports a fractal model of cathode spots. Our preliminary research indicate that materials of high cohesive energy have a cutoff of self-similarity at 50 MHz while no cutoff could be found up to 100 MHz for non-refractory metals. The amplitude of colored noise scaled approximately linearly with the cathode's cohesive energy, which is another manifestation of the Cohesive Energy Rule. a) electronic address: aanders@lbl.gov LBNL-57025 1The plasma of cathodic vacuum arcs is produced at non-stationary cathode spots 1 . Much research, both theoretically 2-7 and experimentally [8][9][10][11][12][13][14] , has been done for decades to understand the spot phenomena that produce non-equilibrium plasmas containing multiply ion charge states. The plasma is mesosonic 15 ,i.e., subsonic for electrons and supersonic for ions, with respect to the local ion sound velocity. Difficulties in experimentation and modeling are associated with the spots' fast changes, small sizes, and extreme gradients of power density and particle densities. The formation of spot plasma is often described as a sequence of microexplosions, where cathode material transitions through various phases, from solid to liquid, non-ideal plasma and/or gas phases, finally turning into in a non-equilibrium, expanding, fully ion ionized plasma 6,16 .With improvement of experimental techniques, faster and smaller phenomena have been discovered. This becomes especially striking when the issue of current density is considered. As the apparent area of electron emission was found to be smaller than previously thought, the corresponding current density increased accordingly 17,18 . There were arguments what constitutes an electron-emitting site.In one extreme, electron emission should occur from areas much larger than the molten crater due to intense ion bombardment of the crater vicinity. On the other hand, the most relevant electron emission area might be smaller than the later visible crater because crater formation could be the result of the action of several spot fragments or cells.In order to make any useful statements on cathode processes and parameters of cathodic arc plasma, many researches decided to repeat measurements and average the measured data. For example, one can find data on average ion charge states 10,19 , average burning voltages 20,21 , average ion velocities 15 , or average ion velocity distribution functions 22 .All parameters fluctuate with large amplitude; in some cases up to...