Analysis of Temperature Stability and Change of Resonant Frequency of a Capacitive MEMS Accelerometer

Le, Xuan Luc; Kim, Ki-Hoon; Choa, Sung‐Hoon

doi:10.1007/s12541-021-00602-1

Cited by 10 publications

(8 citation statements)

References 24 publications

Supporting

Mentioning

Contrasting

Unclassified

Order By: Relevance

“…Similarly, the net capacitance change for an input acceleration is strongly dependent on the initial air gap between the stator and rotor combs. In addition to the geometric design parameters, the performance of the MEMS accelerometer is affected by the operating temperature and air pressure conditions, which has been discussed in detail in [6,23]. In this work, we have considered both the MEMS accelerometer geometric design parameters and operating conditions as parameters for the optimization.…”

Section: Mems Accelerometer Designmentioning

confidence: 99%

Deep Learning Based Multiresponse Optimization Methodology for Dual-Axis MEMS Accelerometer

et al. 2023

View full text Add to dashboard Cite

This paper presents a deep neural network (DNN) based design optimization methodology for dual-axis microelectromechanical systems (MEMS) capacitive accelerometer. The proposed methodology considers the geometric design parameters and operating conditions of the MEMS accelerometer as input parameters and allows to analyze the effect of the individual design parameters on the output responses of the sensor using a single model. Moreover, a DNN-based model allows to simultaneously optimize the multiple output responses of the MEMS accelerometers in an efficient manner. The efficiency of the proposed DNN-based optimization model is compared with the design of the computer experiments (DACE) based multiresponse optimization methodology presented in the Literature, which showed a better performance in terms of two output performance metrics, i.e., mean absolute error (MAE) and root mean squared error (RMSE).

show abstract

Section: Mems Accelerometer Designmentioning

confidence: 99%

Deep Learning Based Multiresponse Optimization Methodology for Dual-Axis MEMS Accelerometer

et al. 2023

View full text Add to dashboard Cite

show abstract

“…Related scholars have carried out the sensitive stress analysis of micro gyroscopes and micro accelerometers and obtained that temperature stress is an important factor affecting their performance [3][4][5]11]. Therefore, the temperature stress was selected to carry out a constant stress accelerated storage test on MIMU, and the temperature stress was controlled to be 60°C during the test.…”

Section: Mimu Storage Degradation Testmentioning

confidence: 99%

Reliability assessment for micro inertial measurement unit based on accelerated degradation data and copula theory

Chi¹,

Wang²,

Hu³

et al. 2022

Eksploatacja i Niezawodność – Maintenance and Reliability

View full text Add to dashboard Cite

With its extensive use in industry, assessing the reliability of the micro inertial measurment unit (MIMU) has become a pressing need. Unfortunately, the MIMU is made up of several components, and the degradation processes of each are intertwined, making it difficult to assess the MIMU’s reliability and remaining useful life. In this research, we offer a reliability assessment approach for the MIMU, which has long-lifetime and multiple performance characteristics (PCs), based on accelerated degradation data and copula theory.Each PC model of MIMU is constructed utilizing drift Brownian motion to depict accelerated degradation process. The copula function is used to model the multivariate dependent accelerated degradation test data and to describe the dependency between multiple MIMU performance parameters. The particle swarm optimization algorithm is used to estimate the unknown parameters in the multi-dependent ADT model. Finally, the storage test and simulation example on MIMU’s accelerated degradation data verify the feasibility and effectiveness of the proposed method.

show abstract

“…4. При подробном исследовании рельефа поверхности и формы МЭМС-структур и изделий на их основе: акселерометров [22], сенсоров давления [23], адаптивной оптики [24,25] и др. Здесь необходимо анализировать и начальную форму МЭМС, и ее изменение, как под действием ожидаемых функционально необходимых воздействий [25], так и под действием различных разрушающих факторов [26].…”

Section: международный симпозиум "unclassified

Методика Исследования Изменения Формы Пластин И Тонкопленочных Мембран С Использованием Геоморфометрических Подходов

Dedkova¹,

Флоринский²,

Дюжев³

2022

Журнал Технической Физики

View full text Add to dashboard Cite

We discuss a technique for investigating changes in complex topography and shape of structures using geomorphometric methods to study surfaces of wafers and membranes formed by the Bosch process. The wafers were analyzed before and after the deposition of the SiO2 layer. The membranes were analyzed during the bulge testing. The study was carried out using maps of the catchment area and principal curvatures taking into account artifacts of the approximation of experimental data. We found a correspondence between the distribution of lines connecting the highest surface areas before and after the deposition of the SiO2 layer on the wafers. For membranes with structure: Al (0.8 μm)/SiO2 (0.6 μm)/Al (1.1 μm), pSi*(0.8 μm)/SiNx (0.13 μm)/SiO2, Al (0.6 μm) – we also found that features of membrane boundaries are mainly caused by their initial shape rather than change under the action of an applied pressure. The advantages of geomorphometry methods for studying changes in the shape of wafers and thin-film membranes in technological processes for the manufacturing of microelectronic devices are shown in comparison with traditional methods for analyzing surface topography maps.

show abstract

Analysis of Temperature Stability and Change of Resonant Frequency of a Capacitive MEMS Accelerometer

Cited by 10 publications

References 24 publications

Deep Learning Based Multiresponse Optimization Methodology for Dual-Axis MEMS Accelerometer

Deep Learning Based Multiresponse Optimization Methodology for Dual-Axis MEMS Accelerometer

Reliability assessment for micro inertial measurement unit based on accelerated degradation data and copula theory

Методика Исследования Изменения Формы Пластин И Тонкопленочных Мембран С Использованием Геоморфометрических Подходов

Contact Info

Product

Resources

About