Analysis of subsurface damage during fabrication process and its removal

Xiao, Kun; Bao, Lei; Wang, Wei; Zhu, Jianqiang

doi:10.1117/12.907907

Cited by 2 publications

(2 citation statements)

References 19 publications

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“…It is well know that the hydrofluoric (HF) acid etching method is an effective way to reveal subsurface morphology of the quartz glass [17][18][19]. The surface and subsurface structures were observed by whitelight interferometer (Zygo New view 700) with lens 50× and atomic force microscopy (AFM, Bruker's Dimension Icon) with a scan size of 10 μm × 10 μm.…”

Section: Surface Evaluation By Chemical Etching Methodsmentioning

confidence: 99%

Surface evaluation and evolution during hydrodynamic effect polishing for quartz glass

Peng

Guan

2014

Appl. Opt.

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Hydrodynamic effect polishing (HEP), a noncontact machining process, can realize the processed surface roughness as small as atomic level. To investigate the subsurface structure, the HEP processed quartz glass surface was etched by the hydrofluoric acid solution. It has been proved that HEP is a polishing method with the ability to process the surface with atomic-level flatness and damage-free surface/ subsurface. It has been found that the microplastic scratches on the lap prepolished glass were obviously exposed when the thin redeposition layer was removed. Then the scratches were gradually removed and surface roughness decreased quickly as the removal depth increased. The surface becomes very smooth and the surface roughness maintains at an atomic level when the subsurface damage is removed clearly. The experimental results demonstrated that the defects such as the scratches parallel to the rotational axis of the wheel were firstly removed during the polishing process, and then the defects vertical to the wheel rotational axis were removed.

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Section: Surface Evaluation By Chemical Etching Methodsmentioning

confidence: 99%

Surface evaluation and evolution during hydrodynamic effect polishing for quartz glass

Peng

Guan

2014

Appl. Opt.

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“…The subsurface defects reduce the laser-induced damage threshold (LIDT), and affect the mechanical and scattering properties. To decrease the subsurface defects in optical glass, step-by-step classic processing is applied to process the light pass surface of Nd:glass [14] , and the cracks left in the glass have micron or submicron dimensions [15] . The side of the glass is processed by a computer numerical control (CNC) machine because of its large length–width ratio, and subsurface defects remain near the surface [16] .…”

Section: Introductionmentioning

confidence: 99%

Effects of side subsurface defects induced by CNC machine on the gain spatial distribution in neodymium phosphate glass

Wang

Zhang

Shi

et al. 2016

High Pow Laser Sci Eng

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The processing method applied to the side surface is different from the method applied to the light pass surface in neodymium phosphate glass (Nd:glass), and thus subsurface defects remain after processing. The subsurface defects in the side surface influence the gain uniformity of Nd:glass, which is a key factor to evaluate the performance of amplifiers. The scattering characteristics of side subsurface defects were simulated by finite difference time domain (FDTD) Solutions software. The scattering powers of the glass fabricated by a computer numerical control (CNC) machine without cladding were tested at different incident angles. The trend of the curve was similar to the simulated result, while the smallest point was different with the complex true morphology. The simulation showed that the equivalent residual reflectivity of the cladding glass can be more than 0.1% when the number of defects in a single gridding is greater than 50.

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Analysis of subsurface damage during fabrication process and its removal

Cited by 2 publications

References 19 publications

Surface evaluation and evolution during hydrodynamic effect polishing for quartz glass

Surface evaluation and evolution during hydrodynamic effect polishing for quartz glass

Effects of side subsurface defects induced by CNC machine on the gain spatial distribution in neodymium phosphate glass

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