Abstract:We investigate a brief method extracting properties of damage layer in low-k film using the electrical measurement of Cu interconnects. In the electrical measurements, the capacitance measurement is useful for evaluating the damage layer in low-k film because the increase of k-value in low-k film affects directly the change of Cu interconnects capacitance. The interline capacitance including the damage layer can be described by a serial connected parallel-plate capacitor model. The analysis of electromagnetic … Show more
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