2015
DOI: 10.1109/led.2015.2411742
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Analysis of Self-Heating Effect on Short Channel Amorphous InGaZnO Thin-Film Transistors

Abstract: We report on a TFT degradation encountered in short channel a-IGZO TFTs under high applied power condition leading to self-heating. Negative shift was observed in the initial stage of stress period followed by positive shift with severe degradation. To understand the causes of this phenomenon in depth, trap density-of-states were measured by photo-excited charge-collection spectroscopy and time dependent recovery of stressed device samples was also studied. As a result, we found that the combination of hot car… Show more

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Cited by 21 publications
(7 citation statements)
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“…5,8,13) In TAOS-TFTs, many researchers predicted the existence of hot carriers as one of the degradation models of device reliability from transfer characteristics and capacitancevoltage (C-V ) characteristics. [20][21][22][23][24][25][26][27][28][29][30][31][32][33][34] However, it is a discussion point as to whether the generation of hot carriers is possible or not because TAOS such as IGZO have an amorphous structure and exhibit relatively low mobility of around 10 cm 2 V −1 s −1 compared with poly-Si or sc-Si. When hot carriers are generated in TAOS-TFTs, photon emission should be observed.…”
mentioning
confidence: 99%
“…5,8,13) In TAOS-TFTs, many researchers predicted the existence of hot carriers as one of the degradation models of device reliability from transfer characteristics and capacitancevoltage (C-V ) characteristics. [20][21][22][23][24][25][26][27][28][29][30][31][32][33][34] However, it is a discussion point as to whether the generation of hot carriers is possible or not because TAOS such as IGZO have an amorphous structure and exhibit relatively low mobility of around 10 cm 2 V −1 s −1 compared with poly-Si or sc-Si. When hot carriers are generated in TAOS-TFTs, photon emission should be observed.…”
mentioning
confidence: 99%
“…Moreover, the power of Stage-Ⅱ exceeds 15 mW, higher than the required SH-activated power [8] . Such SH-induced channel carriers are often ascribed to the heat-driven external dopants (e.g., hydrogen) from the doped S/D [9,15] or the thermal induction of shallow-donor defects from deep states (e.g., oxygen vacancy V O ) [10,22] . Considering the n + a-IGZO S/D in this work is formed by Ar plasma rather than doped with external donors, the SH effect in Stage-Ⅱ most plausibly turns the deep-state Vo into the shallow-donor Vo in the a-IGZO chan- nel [10,14] , as illustrated in Fig.…”
Section: Resultsmentioning
confidence: 99%
“…Besides the superior switching characteristics, the high-current driving capability of AOS TFTs is increasingly demanded by advanced applications, such as the gate driver on the array (GOA), electroluminescence, and micro-LED displays [5−7] . So far, the AOS TFTs under high current stresses (HCSs) have encountered complicated severe degradation behaviors, such as threshold voltage (V th ) shift [8] , abnormal hump [9,10] , subthreshold swing (SS) deterioration [11] , and even hard breakdown [12] .…”
Section: Introductionmentioning
confidence: 99%
“…Shortchannel (up to 1 µm), high-frequency TFTs need to operate very close to their threshold voltage and are typically characterised and operated at a maximum V DS ≤ 2 V [28,93]. This is due to the degradation of the channel caused by hot-carrier effects and selfheating, which becomes more severe as the length of the channel decreases [101]. Because of this, highpower TFTs for applications such as audio amplifiers require larger channel lengths of tens of micrometers to withstand large voltages and currents, at the expense of a considerably lower operation frequency [98].…”
Section: Flexible Metal Oxide Tftsmentioning
confidence: 99%