Analysis of residual errors during computer controlled polishing

Killinger, Simon; Haberl, Alexander; Rascher, Rolf

doi:10.1051/epjconf/201921507001

EPJ Web Conf.

2019

DOI: 10.1051/epjconf/201921507001

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Analysis of residual errors during computer controlled polishing

Simon Killinger

Alexander Haberl

Rolf Rascher

Abstract: In computer controlled subapertur polishing the formation of mid spatial frequency errors (MSFE) needs special attention. In this work the formation of MSFE in feed direction is investigated using the ADAPT tool from Satisloh.

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Analysis of residual errors during computer controlled polishing

Abstract: In computer controlled subapertur polishing the formation of mid spatial frequency errors (MSFE) needs special attention. In this work the formation of MSFE in feed direction is investigated using the ADAPT tool from Satisloh.

Cited by 0 publications

References 5 publications

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