Abstract:This paper studies the control theory and the methods of the silicon micromachined resonant accelerometers(SMRAs). According to the structure and movement of the resonant accelerometer, the model of its dynamics and the equations of motion are deduced. The model of the closed-loop control is set up with the phase lock loop (PLL). The principle of PLL is expounded in detail. The requirements for phases and gains of the sinusoidal self-drive-oscillation are met by PLL. The average method is to take the average o… Show more
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