Analysis of Multi-elemental Thin Films via Calibration-Free Laser-Induced Breakdown Spectroscopy

Hermann, J.; Axente, E.; Pelascini, Frédéric; Crăciun, V.

doi:10.1021/acs.analchem.8b05780

Cited by 37 publications

(15 citation statements)

References 31 publications

(65 reference statements)

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“…The experiments were carried out in experimental conditions that enable accurate modeling of the plasma emission spectrum [21,22]. Laser ablation was pro-duced with a frequency-quadrupled Nd:YAG laser, delivering ultraviolet (266 nm) pulses of 4 mJ energy and 4 ns duration.…”

Section: Experimental Section 221 Libs Setupmentioning

confidence: 99%

Measurement error due to self-absorption in calibration-free laser-induced breakdown spectroscopy

Taleb

Motto-Ros

Carru

et al. 2021

Analytica Chimica Acta

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Self-absorption of spectral lines is known to lower the performance of analytical measurements via calibration-free laser-induced breakdown spectroscopy. However, the error growth due to this effect is not clearly assessed.Here we propose a method to quantify the measurement error due to self-absorption based on the calculation of the spectral radiance of a plasma in local thermodynamic equilibrium. Validated through spectroscopic measurements for a binary alloy thin film of compositional gradient, the method evidences that measurement performance lowering due to self-absorption depends on the spectral shape of the analytical transition and on the intensity measurement method. Thus, line-integrated intensity measurements of Stark broadened lines enable accurate analysis, even at large optical thickness, if line width and plasma size are precisely known. The error growth due to self-absorption is significantly larger for line shapes dominated by Doppler broadening and for line-center intensity measurements. The findings present a significant advance in compositional measurements via calibration-free laser-induced breakdown spectroscopy, as they enable straightforward selection of most appropriate analytical lines.

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Section: Experimental Section 221 Libs Setupmentioning

confidence: 99%

Measurement error due to self-absorption in calibration-free laser-induced breakdown spectroscopy

Taleb

Motto-Ros

Carru

et al. 2021

Analytica Chimica Acta

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“…All these advantages make LIBS imaging very promising with the potential to become a reference technique in the panel of space-resolved elemental approaches, also including electron The analytical techniques based on calibration with standard samples are not applicable to thin film analysis and specific techniques such as Rutherford backscattering spectrometry or X-ray photoelectron spectrometry have been developed to measure the elemental composition of submicron-thick deposited layers. We have shown recently that calibration-free LIBS measurements provide analysis of multielement thin films with an analytical performance better than those obtained with other techniques [202]. The demonstration was given for a 150 nm thick nickel−chromium−molybdenum alloy thin film that was deposited by pulsed laser deposition.…”

Section: Libs Biological Imagingmentioning

confidence: 99%

Short-Pulse Lasers: A Versatile Tool in Creating Novel Nano-/Micro-Structures and Compositional Analysis for Healthcare and Wellbeing Challenges

et al. 2021

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Driven by flexibility, precision, repeatability and eco-friendliness, laser-based technologies have attracted great interest to engineer or to analyze materials in various fields including energy, environment, biology and medicine. A major advantage of laser processing relies on the ability to directly structure matter at different scales and to prepare novel materials with unique physical and chemical properties. It is also a contact-free approach that makes it possible to work in inert or reactive liquid or gaseous environment. This leads today to a unique opportunity for designing, fabricating and even analyzing novel complex bio-systems. To illustrate this potential, in this paper, we gather our recent research on four types of laser-based methods relevant for nano-/micro-scale applications. First, we present and discuss pulsed laser ablation in liquid, exploited today for synthetizing ultraclean “bare” nanoparticles attractive for medicine and tissue engineering applications. Second, we discuss robust methods for rapid surface and bulk machining (subtractive manufacturing) at different scales by laser ablation. Among them, the microsphere-assisted laser surface engineering is detailed for its appropriateness to design structured substrates with hierarchically periodic patterns at nano-/micro-scale without chemical treatments. Third, we address the laser-induced forward transfer, a technology based on direct laser printing, to transfer and assemble a multitude of materials (additive structuring), including biological moiety without alteration of functionality. Finally, the fourth method is about chemical analysis: we present the potential of laser-induced breakdown spectroscopy, providing a unique tool for contact-free and space-resolved elemental analysis of organic materials. Overall, we present and discuss the prospect and complementarity of emerging reliable laser technologies, to address challenges in materials’ preparation relevant for the development of innovative multi-scale and multi-material platforms for bio-applications.

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“…To this end, laser-induced breakdown spectroscopy (LIBS) is a spectrochemical technique that has shown promising results for quantitative and qualitative elemental analyses for biomedical studies, 3,4 thin films, [5][6][7] composite nanomaterial characterizations, [8][9][10][11][12][13] forensics, 14,15 explosive/energetic materials, 16,17 in solid, gas, or, aerosol phases, 10,18,19 and more recently, Li-dopant concentrations in Li-ion battery electrode materials. 20,21 A few studies were dedicated specifically toward the detection of trace oxygen.…”

Section: Introductionmentioning

confidence: 99%

Deep Learning Models for Data-Driven Laser Induced Breakdown Spectroscopy (LIBS) Analysis of Interstitial Oxygen Impurities in Czochralski-Si Crystals

Davari

Mukherjee

2022

Appl Spectrosc

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Analytical advantages of facile and expeditious spectral data collections from laser-induced breakdown spectroscopy (LIBS) are often offset by the low-accuracy quantitative analyses offered by the technique due to non-equilibrium plasma-matrix interactions. Herein, we develop 1D convolutional neural network (CNN) and least absolute shrinkage and selection operator (LASSO) models for LIBS data analyses to predict trace amounts of interstitial oxygen (Oi) impurities in commercial Czochralski-silicon (Cz-Si) crystals with known Oi concentrations (0 - 16 ppm). While traditional spectral analyses from O I (777.2 nm) atomic lines offer poor accuracy, CNN and LASSO analyses generate excellent predictions for the Oi concentrations. Specifically, CNN-based spectral analyses uniquely identified systematic alterations in LIBS fingerprints manifested by laser-matter interactions. Our results pave the path for combining facile and voluminous LIBS data collection with deep learning driven high-fidelity data analytics.

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Analysis of Multi-elemental Thin Films via Calibration-Free Laser-Induced Breakdown Spectroscopy

Cited by 37 publications

References 31 publications

Measurement error due to self-absorption in calibration-free laser-induced breakdown spectroscopy

Measurement error due to self-absorption in calibration-free laser-induced breakdown spectroscopy

Short-Pulse Lasers: A Versatile Tool in Creating Novel Nano-/Micro-Structures and Compositional Analysis for Healthcare and Wellbeing Challenges

Deep Learning Models for Data-Driven Laser Induced Breakdown Spectroscopy (LIBS) Analysis of Interstitial Oxygen Impurities in Czochralski-Si Crystals

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