Abstract:Abstract:Heating by induction is a promising technology for processing circular semiconductor wafers because it offers quick and high temperature heating. Heat develops inside the work piece hence losses due to conduction and radiation is reduced. It is rather difficult to attain uniform temperature distribution in the work piece using single coil induction heating method. In this paper, a multi coil induction heating system for processing circular semiconductor wafers is proposed. The working coil or inductor… Show more
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