Analysis of hotspots that impact defectivity from light source bandwidth variation using Lithography Manufacturability Checker (LMC) (Conference Presentation)

Conley, Will; Peng, Yi-Hsing; Zhang, Xiaolong; Hsu, Stephen; Greca, R. La

doi:10.1117/12.2299319

Optical Microlithography XXXI 2018

DOI: 10.1117/12.2299319

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Analysis of hotspots that impact defectivity from light source bandwidth variation using Lithography Manufacturability Checker (LMC) (Conference Presentation)

Will Conley¹,

Yi-Hsing Peng²,

Xiaolong Zhang³

et al.

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Analysis of hotspots that impact defectivity from light source bandwidth variation using Lithography Manufacturability Checker (LMC) (Conference Presentation)

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