“…The displacement maintains a harmonic profile at low excitation levels. Higher voltage and greater SNR are obtained because of increase of range of motion of the TENG using the dome-shaped structure, which increased the initial height from 2 μm in our previous work [1] to 20 μm in the present study. Also, the engagement of the periphery of the dome-shaped structure with the underneath polyimide increases 𝜎 t in Equation ( 23), which further increases the output voltage and the SNR.…”
Section: Analytical Modelingsupporting
confidence: 49%
“…where x(t) denotes the displacement of the MEMS-TENG center from the initial state Figure 2d, and m is the equivalent mass in Equation (1). Considering the MEMS-TENG position in Figure 2d as the initial position of the diaphragm, in the pres-ence of a harmonic external vibration, the diaphragm displacement toward the substrate is greater than the motion away from it.…”
Section: Mechanism Description and Modelingmentioning
confidence: 99%
“…For example, a diagnostic method for potential mechanical failure in car components is based on measuring the vibrations on the gear housing and the gear backlash. [1,2] Safety of mechanical motors can be ensured by integrating vibration and temperature sensors, which reduce the motor speed if threshold values are exceeded. [3] The common methods used for motion sensing are capacitive, electromagnetic, piezoelectric, electret, and triboelectric sensing.…”
Two solutions for improving MEMS triboelectric vibration sensors performance in contact‐separation mode are reported experimentally and analytically. Triboelectric sensors have mostly been studied in the mesoscale. The gap variation between the electrodes induces a potential difference that represents the external vibration. Miniaturizing the device limits the sensor output because of the limited gap. This work offers a warped MEMS diaphragm constrained on its edges. The dome‐shaped structure provides one order of magnitude larger displacement after contact‐separation than standard designs resulting in one order of magnitude greater voltage and signal‐to‐noise‐ratio. Second, micro triboelectric sensors do not operate unless the external vibration is sufficiently forceful to initiate contact between layers. The proposed constraints on the edge of the diaphragm provide friction during periodic motion and generate charges. The combination of the warped diaphragm and boundary constraints instead of serpentine springs increases the charge density and voltage generation. The mechanical properties and electrical output are thoroughly investigated including nonlinearity, sensitivity, and signal‐to‐noise ratio. A sensitivity of 250 mV g−1 and signal‐to‐noise‐ratio of 32 dB is provided by the presented device at resonance, which is very promising for event‐driven motion sensors because it does not require signal conditioning and therefore simplifies the sensing circuitry.
“…The displacement maintains a harmonic profile at low excitation levels. Higher voltage and greater SNR are obtained because of increase of range of motion of the TENG using the dome-shaped structure, which increased the initial height from 2 μm in our previous work [1] to 20 μm in the present study. Also, the engagement of the periphery of the dome-shaped structure with the underneath polyimide increases 𝜎 t in Equation ( 23), which further increases the output voltage and the SNR.…”
Section: Analytical Modelingsupporting
confidence: 49%
“…where x(t) denotes the displacement of the MEMS-TENG center from the initial state Figure 2d, and m is the equivalent mass in Equation (1). Considering the MEMS-TENG position in Figure 2d as the initial position of the diaphragm, in the pres-ence of a harmonic external vibration, the diaphragm displacement toward the substrate is greater than the motion away from it.…”
Section: Mechanism Description and Modelingmentioning
confidence: 99%
“…For example, a diagnostic method for potential mechanical failure in car components is based on measuring the vibrations on the gear housing and the gear backlash. [1,2] Safety of mechanical motors can be ensured by integrating vibration and temperature sensors, which reduce the motor speed if threshold values are exceeded. [3] The common methods used for motion sensing are capacitive, electromagnetic, piezoelectric, electret, and triboelectric sensing.…”
Two solutions for improving MEMS triboelectric vibration sensors performance in contact‐separation mode are reported experimentally and analytically. Triboelectric sensors have mostly been studied in the mesoscale. The gap variation between the electrodes induces a potential difference that represents the external vibration. Miniaturizing the device limits the sensor output because of the limited gap. This work offers a warped MEMS diaphragm constrained on its edges. The dome‐shaped structure provides one order of magnitude larger displacement after contact‐separation than standard designs resulting in one order of magnitude greater voltage and signal‐to‐noise‐ratio. Second, micro triboelectric sensors do not operate unless the external vibration is sufficiently forceful to initiate contact between layers. The proposed constraints on the edge of the diaphragm provide friction during periodic motion and generate charges. The combination of the warped diaphragm and boundary constraints instead of serpentine springs increases the charge density and voltage generation. The mechanical properties and electrical output are thoroughly investigated including nonlinearity, sensitivity, and signal‐to‐noise ratio. A sensitivity of 250 mV g−1 and signal‐to‐noise‐ratio of 32 dB is provided by the presented device at resonance, which is very promising for event‐driven motion sensors because it does not require signal conditioning and therefore simplifies the sensing circuitry.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.