Analysis of extreme ultraviolet mask defect inspection based on complex amplitudes of the aerial images

Zhang, Longqaio; Li, Sikun; Zheng, Hang; Yuan, Shuai; Wang, Xiangzhao

doi:10.1117/12.3007756

Fourteenth International Conference on Information Optics and Photonics (CIOP 2023) 2023

DOI: 10.1117/12.3007756

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Analysis of extreme ultraviolet mask defect inspection based on complex amplitudes of the aerial images

Longqaio Zhang,

Sikun Li,

Hang Zheng

et al.

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Analysis of extreme ultraviolet mask defect inspection based on complex amplitudes of the aerial images

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References 22 publications

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