Analysis of Electron Transport Coefficients in SiH4 Gas Using Boltzmann Equation in the Presence of Applied Electric Field
Abstract:Monosilane (SiH 4) plasma has numerous applications in plasma processing, transport coefficients are better to understanding and modeling of these gas discharge processes. The electron swarms in a monosilane gas under influence of uniform electric field can be calculated using two term approximation of Boltzmann equation for the range 1 ≤ E/N ≤ 1000 Td (1 Td= 1x10-17 V.cm 2). The effective ionization coefficient's (α-η)/N and electron swarm parameters are calculated and compared with experimental and theoretic… Show more
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