2020
DOI: 10.1017/s1431927620001464
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Analysis of Electron Transparent Beam-Sensitive Samples Using Scanning Electron Microscopy Coupled With Energy-Dispersive X-ray Spectroscopy

Abstract: Scanning electron microscopy, coupled with energy-dispersive X-ray spectroscopy (EDS), is a powerful tool used in many scientific fields. It can provide nanoscale images, allowing size and morphology measurements, as well as provide information on the spatial distribution of elements in a sample. This study compares the capabilities of a traditional EDS detector with a recently developed annular EDS detector when analyzing electron transparent and beam-sensitive NaCl particles on a TEM grid. The optimal settin… Show more

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Cited by 7 publications
(6 citation statements)
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“…106 In samples such as NaCl, this can initially be seen as degassing of the material. 108,109 If a sample is solely composed of metals, mineral dust, or soot, it will likely be stable for imaging. Any aerosol particles composed of organic compounds or salts can be damaged.…”
Section: ■ Tem Techniquementioning
confidence: 99%
“…106 In samples such as NaCl, this can initially be seen as degassing of the material. 108,109 If a sample is solely composed of metals, mineral dust, or soot, it will likely be stable for imaging. Any aerosol particles composed of organic compounds or salts can be damaged.…”
Section: ■ Tem Techniquementioning
confidence: 99%
“…These elements were chosen as they represent each of the different particle types, identified when inspecting the SE images overlaid by their corresponding EDS map. Once the segmentation was performed, the x-ray spectra from pixels within each recognized particle were summed and quantified using the Cliff-Lorimer model as recommended by Brostrøm et al (34). Particles were classified based on their elemental composition, using the classification scheme presented in Table 1.…”
Section: Particle Monitoring and Sampling Techniquesmentioning
confidence: 99%
“…All samples were analyzed at 10 keV, using an aperture size of 50 µm and a spot number of 3.5 with a 0.16 nA probe current. An XFlash FlatQuad (Bruker Nano, Germany) EDS detector was used to measure the elemental composition of particles by mapping the entire imaged area as detailed in our previous work 40 . Maps from the second stage of the impactor were acquired with a pixel dwelltime of 256 µs with acquisition times of approximately 4 minutes, while maps from the third stage were acquired with 128 µs dwelltime resulting in roughly 8 minutes/map, due to a larger image size.…”
Section: Electron Microscopymentioning
confidence: 99%
“…The bremsstrahlung X-ray contribution was accounted for using the SEM fitting option in ESPRIT with relevant fitting areas identified automatically. The Cliff-Lorimer quantification model was used for quantification, as it ignores most matrix interactions and is therefore suited for thin electron transparent samples 34,40,53,54 . Maps acquired on the Ni disc samples were quantified with the standardless P/B-ZAF method, as matrix interactions could no longer be ignored.…”
Section: Electron Microscopymentioning
confidence: 99%
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