Analysis of Electromechanical Deformation of a MEMS Element of a Reflection-Type Dynamic Mask Based on a Torsional Micromirror

Demin, G. D.; Kim, Pavel P.; Pozdnyakov, Mikhail M.; Filippov, Nikolay A.; Dyuzhev, N. A.

doi:10.1109/edm55285.2022.9855067

2022 IEEE 23rd International Conference of Young Professionals in Electron Devices and Materials (EDM) 2022

DOI: 10.1109/edm55285.2022.9855067

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Analysis of Electromechanical Deformation of a MEMS Element of a Reflection-Type Dynamic Mask Based on a Torsional Micromirror

G. D. Demin

Pavel P. Kim

Mikhail M. Pozdnyakov

et al.

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Analysis of Electromechanical Deformation of a MEMS Element of a Reflection-Type Dynamic Mask Based on a Torsional Micromirror

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References 19 publications

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