Analysis of Electret-Based MEMS Vibrational Energy Harvester With Slit-and-Slider Structure

Satô, Norio; Ono, K.; Shimamura, Teppei; Kuwabara, Kei; Ugajin, Mamoru; Sato, Yasuhiro

doi:10.1109/jmems.2012.2204862

Cited by 12 publications

(13 citation statements)

References 40 publications

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“…Electrostatic energy harvesters are usually composed of a pair of electrodes that are coated with electret materials such as a CYTOP film [29][30][31]. In particular, most electretbased vibra tional energy harvesters consist of sliding electrodes [32,33] or cantilevers [34], which generate electrostatic inductive currents when the relative distance or overlap of the electrodes changes due to the mechanical vibrations. For instance, the device reported in [35] uses a pair of parallel plates that oscil late at a relatively large stroke compared with the device size, thereby increasing the velocity of the mass and generating power of more than several hundreds of micro Watts from the environmental vibrations of low frequency (a few Hz) and small acceleration (<1 G).…”

Section: Introductionmentioning

confidence: 99%

A power-density-enhanced MEMS electrostatic energy harvester with symmetrized high-aspect ratio comb electrodes

Honma

Tohyama

Mitsuya

et al. 2019

J. Micromech. Microeng.

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In this paper, we experimentally demonstrate a new approach to improve the output power of electrostatic energy harvester with an electret skin. A symmetric threeports combelectrode mechanism is used to reduce the binding electrostatic force, thereby allowing a smooth mechanical motion of the suspended electrodes of a highaspect ratio in a small acceleration range. Given the same device footprint, two energy harvesters having different aspect ratios are prepared to compare the power generation performances. The output power is increased 6.4 times by increasing the aspectratio from the 7.1 to 33.3. At the same time, the volumetric power density is also improved from 62.5 μW cm −3 to 270.2 μW cm −3 . These results suggest a possibility to further enhance the aspect ratio to shorten the charge time of a large storage capacitor for autonomous internet of things wireless sensor node.

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Section: Introductionmentioning

confidence: 99%

A power-density-enhanced MEMS electrostatic energy harvester with symmetrized high-aspect ratio comb electrodes

Honma

Tohyama

Mitsuya

et al. 2019

J. Micromech. Microeng.

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show abstract

“…The useful power output of a harvester is obtained from [34] as Here, to increase the useful power output, an optimized impedance matching of an external load is important. In this case, the difference between this structure and our previous device [34] is only the gap between the movable and fixed electrode for the structure. To compare the difference, the same setup with the lock-in amplifier was applied.…”

Section: Power Outputmentioning

confidence: 99%

Power Generation Enhancement with Gap Narrowing by Using a Nested Flip-Chip Assembly in a Millimeter-Sized Microelectromechanical-System Electrostatic Vibrational Energy Harvester

Ono

Satô

Sakata

et al. 2014

Transactions of The Japan Institute of Electronics Packaging

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This paper describes power generation enhancement in a millimeter-sized slit-and-slider structure in an electrostatic vibrational microelectromechanical-system (MEMS) device for energy harvesting. To increase current generation, we have developed a new method to narrow the gap between movable and fixed electrodes for energy conversion in a limited size. The device is fabricated with a nested flip-chip assembly technique. This method can achieve a micron level gap narrowing of 3.8 μm. The approach greatly increased the power generation to 2.3 nA with a 1 mm 2 movable part in a slit-and-slider structure. The structural normalized power generation having the gap of 3.8 μm is 8.83 times larger than the previous one.

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“…Recently, micro-electromechanical systems (MEMS)-based vibrational energy harvesters have been drawing intense research interest owing to their resonance function to amplify vibrations in the range of small accelerations. (7)(8)(9)(10)(11)(12)(13)(14)(15)(16)(17)(18)(19)(20)(21)(22)(23) The vibrational energy harvesters are grouped into three types, namely, piezoelectric, electromagnetic, and electrostatic, depending on the mechanism of inducing electrical charges. In particular, an electret-based energy harvester can effectively harvest ambient vibrational energy owing to the flexibility of the MEMS design that allows it to adapt to the various frequency ranges.…”

Section: Introductionmentioning

confidence: 99%

Equivalent Circuit Model for MEMS Vibrational Energy Harvester Compatible with Sinusoidal and Nonsinusoidal Vibrations

Honma¹,

Tohyama²,

Ikeno³

et al. 2020

Sensors and Materials

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We build an equivalent Simulation Program with Integrated Circuit Emphasis (SPICE) model for a vibrational energy harvester comprising comb electrodes coated with an electret film that is used to convert the vibrational kinetic energy into electrical output power by electrostatic induction. In the assembled module, sinusoidal and nonsinusoidal vibrations are imported into the nonlinear current sources as an inertial force, and the power-generating performances are simulated. The nonsinusoidal waves observed in an actual environment (highway duct) are used as an input sample. By quantitatively comparing the simulation and experimental results, we verify the applicability of the equivalent module for various vibrations. When the device is excited by sinusoidal vibration, the maximum output power is calculated to be 71 µW at 0.044 G (1 G = 9.8 m/s 2), which is close to the experimental result of the actual device, 68 µW at 0.045 G. Furthermore, when importing a nonsinusoidal vibration, the two timings at the highest generating peak are obtained in accordance with the moment of resonance, and the amplitudes are experimentally and analytically obtained to be 0.80 and 0.63 V, respectively.

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Analysis of Electret-Based MEMS Vibrational Energy Harvester With Slit-and-Slider Structure

Cited by 12 publications

References 40 publications

A power-density-enhanced MEMS electrostatic energy harvester with symmetrized high-aspect ratio comb electrodes

A power-density-enhanced MEMS electrostatic energy harvester with symmetrized high-aspect ratio comb electrodes

Power Generation Enhancement with Gap Narrowing by Using a Nested Flip-Chip Assembly in a Millimeter-Sized Microelectromechanical-System Electrostatic Vibrational Energy Harvester

Equivalent Circuit Model for MEMS Vibrational Energy Harvester Compatible with Sinusoidal and Nonsinusoidal Vibrations

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