Abstract:We present a technique to improve the crosstalk effects in ternary coupled through silicon vias (TSVs). The effects of crosstalk were investigated in TSVs using multi-walled carbon nanotube (MWCNT) as metallic liner and polymers such as polyimide, polypropylene carbonate, and benzocyclobutene (BCB) as dielectric liners. The circuit model for coupled TSVs driven by a ternary inverter was utilized to analyze the various crosstalk issues. The HSPICE tool was utilized to develop the proposed TSVs. The crosstalk is… Show more
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