Analysis of ARROW Waveguide Based Microcantilever for Sensing Application

Asha, K; Krishnaswamy, Narayan; Suryanarayana, N K

doi:10.1007/s11277-022-09872-y

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2024

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Cited by 2 publications

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“…We needed the rib to fit within the width of the etched trench throughout its length. Step (7): Etching into the top layer of oxide over the sacrificial core with hydrofluoric acid, we were able to create a 4-6 µm wide rib [see Figure 3d]. Step (8): For design 1, a final layer of 300 nm of oxide was then deposited over all the trenches.…”

Section: Fabricationmentioning

confidence: 99%

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Air Core ARROW Waveguides Fabricated in a Membrane-Covered Trench

Walker,

Schmidt,

Hawkins

2024

Photonics

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We report the design, fabrication, and characterization of hollow-core anti-resonant reflecting optical waveguides (ARROWs) fabricated in a membrane-covered trench. These structures are built on silicon wafers using standard microfabrication techniques, including plasma etching, to form trenches. Four waveguide designs are demonstrated, which have different numbers of thin-film reflecting layers. We demonstrate that optical loss decreases with additional reflecting layers, with measured loss coefficients as low as 1 cm−1.

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Section: Fabricationmentioning

confidence: 99%

“…These metrics help determine if a hollow waveguide is useful for a given application. Hollow waveguides have found applications ranging from gas and chemical sensing [5], quantum and nonlinear optics [6], MEMS sensors [7], hollow core fibers [8], and free-space optical communications systems [9].…”

Section: Introductionmentioning

confidence: 99%