Analysis of amplitude and dissipation factor of AT-cut quartz crystal resonators over a wide temperature range
Duanqin Zhang,
Linpeng Dou,
Jia Liu
et al.
Abstract:Quartz Crystal Resonators (QCR) are fundamental components of Quartz Crystal Microbalance with Dissipation Monitoring (QCM-D) sensors, which are highly sensitive to temperature. First, theoretical and finite element models of an AT-cut QCR considering temperature coupling are established. Subsequently, the effects of quartz substrate shape and thermal stress on the amplitude and dissipation factor of the resonator across a broad temperature range are analyzed by using the constructed finite element simulation … Show more
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