Analysis of a micromachined piezoelectric energy harvester

Dow, Ali B. Alamin; Kherani, Nazir P.; Schmid, U.

doi:10.1117/2.1201112.003998

Cited by 3 publications

(3 citation statements)

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“…As we know, the resonant frequency of the piezoelectric energy harvester (PEH) increases sharply when the device size reduces to micro level. To date, most of the micro-scale PEHs operate at frequencies of more than 100 Hz [6,7], even at the level of 1 kHz [8]. This limits their applications to harvest some ambient vibration energy, which occurs in the frequency range below 30 Hz, such as those caused by wind or human motions.…”

Section: Introductionmentioning

confidence: 99%

A Novel Tunable Multi-Frequency Hybrid Vibration Energy Harvester Using Piezoelectric and Electromagnetic Conversion Mechanisms

Shan

Chen

et al. 2016

Applied Sciences

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This paper presents a novel tunable multi-frequency hybrid energy harvester (HEH). It consists of a piezoelectric energy harvester (PEH) and an electromagnetic energy harvester (EMEH), which are coupled with magnetic interaction. An electromechanical coupling model was developed and numerically simulated. The effects of magnetic force, mass ratio, stiffness ratio, and mechanical damping ratios on the output power were investigated. A prototype was fabricated and characterized by experiments. The measured first peak power increases by 16.7% and 833.3% compared with that of the multi-frequency EMEH and the multi-frequency PEH, respectively. It is 2.36 times more than the combined output power of the linear PEH and linear EMEH at 22.6 Hz. The half-power bandwidth for the first peak power is also broadened. Numerical results agree well with the experimental data. It is indicated that magnetic interaction can tune the resonant frequencies. Both magnetic coupling configuration and hybrid conversion mechanism contribute to enhancing the output power and widening the operation bandwidth. The magnitude and direction of magnetic force have significant effects on the performance of the HEH. This proposed HEH is an effective approach to improve the generating performance of the micro-scale energy harvesting devices in low-frequency range.

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Section: Introductionmentioning

confidence: 99%

A Novel Tunable Multi-Frequency Hybrid Vibration Energy Harvester Using Piezoelectric and Electromagnetic Conversion Mechanisms

Shan

Chen

et al. 2016

Applied Sciences

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“…1(c). 13 The ARROW structure serves to confine the second-harmonic mode with a large field concentrated within the low index core region. The pump mode, on the other hand, is confined by the aggregate structure in a conventional total internal reflection (TIR) fundamental mode.…”

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confidence: 99%

“…The SiON growth processes use an N 2 O/SiH 4 ratio ranging from 10.6 to 12.9 (with no NH 3 ), power ranging from 20 to 60 W and pressure fixed at 950 mTorr. 13 The compressive stress in a single SiON layer is estimated to be 50-150 MPa, [18][19][20]…”

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confidence: 99%

Harnessing second-order optical nonlinearities at interfaces in multilayer silicon-oxy-nitride waveguides

Logan

Dow

Stepanov

et al. 2013

Applied Physics Letters

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We demonstrate multi-layer silicon-oxy-nitride (SiON) waveguides as a platform for broadband tunable phase-matching of second-order nonlinear interactions arising at material interfaces. Second-harmonic generation (SHG) is measured with a 2 ps pulsed pump of 1515-1535 nm wavelength, where 6 nW power is generated by an average pump power of 30 mW in a 0.92 mm long device. The wavelength acceptance bandwidth of the SHG is as broad as 20 nm due to the low material dispersion of SiON waveguides. The waveguide structure provides a viable method for utilizing second order nonlinearity for light generation and manipulation in silicon photonic circuits. V

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