Analysis of a Mathematical Model of Plate Structures Oscillations in MEMS

Маланчук, Оксана; Vistak, Maria; Politanskyi, Ruslan; Andrusyak, I. V.

doi:10.1109/memstech49584.2020.9109529

2020 IEEE XVIth International Conference on the Perspective Technologies and Methods in MEMS Design (MEMSTECH) 2020

DOI: 10.1109/memstech49584.2020.9109529

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Analysis of a Mathematical Model of Plate Structures Oscillations in MEMS

Оксана Маланчук

Maria Vistak

Ruslan Politanskyi

et al.

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Analysis of a Mathematical Model of Plate Structures Oscillations in MEMS

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References 17 publications

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