2016 International Symposium on Semiconductor Manufacturing (ISSM) 2016
DOI: 10.1109/issm.2016.7934542
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Analysis method of metal contamination for the isopropyl alcohol (IPA)

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“…In manufacturing processes, impurities can affect the desired properties and the performance of the products. The metallic contaminants in semiconductor manufacturing will ruin the final products functionality [13]. The presence of contaminants inside metal during the manufacturing process has the potential to reduce the mechanical qualities of the products.…”
Section: Introductionmentioning
confidence: 99%
“…In manufacturing processes, impurities can affect the desired properties and the performance of the products. The metallic contaminants in semiconductor manufacturing will ruin the final products functionality [13]. The presence of contaminants inside metal during the manufacturing process has the potential to reduce the mechanical qualities of the products.…”
Section: Introductionmentioning
confidence: 99%