2023
DOI: 10.3390/su151713268
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Analysis and Experiments on the Characteristics of Airflow and the Air Cleanliness Protection Region under Fan Filter Units in Cleanrooms

Hao Li,
Chen Huang,
Weiqi Yi
et al.

Abstract: Cleanrooms often utilize large amounts of supply air to achieve a required cleanliness level. To reduce the overall supply air volume, critical processes demanding the highest cleanliness requirements are suggested to be placed directly beneath the air outlet of fan filter units (FFUs). In order to determine an appropriate supply air volume, it is necessary to quantitatively analyze the particulate concentration distribution downstream of FFUs with various characteristics to determine an adequate but not exces… Show more

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