Analysis and experimental study of surface transverse wave resonators on quartz

Abstract

Transversely varying thickness modes in trapped energy resonators with shallow and beveled contours Development and performance of a semiautomated 200 MHz surface acoustic wave resonator arraybased sensor test apparatus Rev.Since surface transverse wave resonators are becoming increasingly used in high-frequency electrical component applications, there is a pressing need for reliable simulation tools in this field. We develop analytical techniques for prediction of the resonant peaks of practical devices and apply them to the results of experiments in this laboratory and in others. The devices investigated are three-grating structures composed of three arrays of metal strips or grooves on quartz substrates, which support a shear horizontal surface wave polarization. The outer gratings act as mirrors for the cavity resonance. The influence of the main design parameters on the resonator response is studied.

Propagation of transverse waves on piezoelectric plates supporting single or double side metal strip gratings

“…However, for weakly coupled piezoelectric substrates like quartz, simple approximations can be applied without strong losses of accuracy. More, it was shown in the case of STW on quartz 15 that such an approach provides significant improvement in the prediction of resonance frequencies compared to a nonpiezoelectric analysis and experimental results.…”

“…6,8,15 This approach has been successfully developed to predict the resonance frequency of three cavity STW resonators 21 and is easily transposable to the present problem. A transfer matrix has to be defined first for any periodic grating.…”

“…A transmission line approach close to the one already developed for STW 15 has also been implemented to predict the resonance frequencies of the studied devices. The corresponding calculations are described in the following section.…”

A Three-Dimensional Finite Element Analysis Model for SH-SAW Torque Sensors

“…To produce a Love wave, materials such as polymethyl methacrylate (PMMA), silicon dioxide (SiO 2 ), gold (Au), and zinc oxide (ZnO) are popularly adopted [30]. Aluminum (Al) gratings and grooves created on the substrate surface are generally used [19,28] for the latter wave type. In this paper, an SH-SAW torque sensor using a wave-guide layer was investigated.…”

“…Since the wave’s displacement components are parallel to the substrate surface and perpendicular to the propagation direction, little damping of the wave exists in fluid or liquid, and hence, detection sensitivity can be greatly improved. In addition, SH-SAW has an approximately 0.6 times higher velocity than Rayleigh waves [27,28], thus making it possible to develop sensors that have a smaller dimension while operating at a higher resonant frequency. Furthermore, when a wireless and passive working situation is involved, the strong signal response of SH-SAWs can provide a longer interrogation distance and better detection accuracy [27].…”