Analysis and Evaluation of Methods for Automated Wafer Handling in High Volume Manufacturing

Kunz, Marc; Verl, Alexander; Goh, Dickson Di Sheng.; Böffert, N.; Ehm, A.; Wertz, R.; Böttinger, F.; Giesen, T.; Fischmann, C.

doi:10.4229/26theupvsec2011-2co.16.3

26th European Photovoltaic Solar Energy Conference and Exhibition; 1107-1110 2011

DOI: 10.4229/26theupvsec2011-2co.16.3

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Analysis and Evaluation of Methods for Automated Wafer Handling in High Volume Manufacturing

Marc Kunz¹,

Alexander Verl

Dickson Di Sheng. Goh³

et al.

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Analysis and Evaluation of Methods for Automated Wafer Handling in High Volume Manufacturing

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