Análisis estructural y morfológico de películas de nitruro de aluminio obtenidas por deposición de láser pulsado

Taborda, Jaime Andrés Pérez; Landázuri, Henry Riascos; García, Francy Nelly Jiménez; Angulo, Julio César Caicedo

doi:10.18359/rcin.279

“…Each data point in the plots represents an average over AFM images. The corresponding error bar was obtained by a standard deviation of the values (Mahmood et al, 2003;PEREZ TABORDA et al;Pérez Taborda et al, 2010;Taborda et al, 2015;Zhuang et al, 2009). Figure 10 shows the grain size and roughness values for the AlN films, thus, in this case, a decreasing tendency in surface measurements was observed when the deposition temperature was increased.…”

Section: Surface Analysis Of Aln Films Via Atomic Force Microscopementioning

confidence: 93%

Research Perspectives on Functional Micro and Nano Scale Coatings

Taborda

¹

,

López

²

2016

Research Perspectives on Functional Micro- And Nanoscale Coatings

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Research topics related to the production of nanocomposites are the most important directions of development of new semiconductor engineering, ensuring high nanocomposites obtaining useful properties in the scope of biophysical characteristics, biomedical and piezoelectric applications. We present two case studies as Hydroxyapatite are in medical applications and aluminum nitride as acoustic wave sensor. Hydroxyapatite, is the main inorganic structure of the tooth enamel and bone and is a biomaterial that is commonly used in biomedical applications that involve bone substitution, drug delivery and bone regeneration because of its excellent biocompatibility, high bioactivity and good osseoconductivity. Since the past decade. Aluminum nitride (AlN), an electrical insulating ceramic with a wide band gap of 6.3 eV, is a potentially useful dielectric material very important in fields such as optoelectronic and micro electronics.

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“…The value of the binding energy obtained for the Al2p peak was 73.9 eV and the higher value for Al2p was 75.6 eV, respectively. According to the literature (Mahmood et al, 2003;Pérez Taborda, Riascos Landázuri, Jiménez García, & Caicedo Angulo, 2010;Taborda, Caicedo, Grisales, Saldarriaga, & Riascos, 2015) for the Al2p peak, the first one (73.9 eV) and the second one (75.6 eV) can be assigned to Al-N and Al-O bonds. The appearance of the peak at 73.9 eV clearly shows that Al has reacted with N; therefore, it can be assigned to Al-N.…”

Section: Figure 6 Xps Survey Spectrum Of Al-n Coatings Deposited On Si 3 N 4 At 300 °C Where Different Elemental Signals Showmentioning

confidence: 98%

“…Each data point in the plots represents an average over AFM images. The corresponding error bar was obtained by a standard deviation of the values (Mahmood et al, 2003;PEREZ TABORDA et al;Pérez Taborda et al, 2010;Taborda et al, 2015;Zhuang et al, 2009).…”

Section: Surface Analysis Of Aln Films Via Atomic Force Microscopementioning

confidence: 99%

Research Perspectives on Functional Micro- and Nanoscale Coatings

Zuzuarregui¹,

Morant‐Miñana²

2016

Advances in Chemical and Materials Engineering

6

0

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Research topics related to the production of nanocomposites are the most important directions of development of new semiconductor engineering, ensuring high nanocomposites obtaining useful properties in the scope of biophysical characteristics, biomedical and piezoelectric applications. We present two case studies as Hydroxyapatite are in medical applications and aluminum nitride as acoustic wave sensor. Hydroxyapatite, is the main inorganic structure of the tooth enamel and bone and is a biomaterial that is commonly used in biomedical applications that involve bone substitution, drug delivery and bone regeneration because of its excellent biocompatibility, high bioactivity and good osseoconductivity. Since the past decade. Aluminum nitride (AlN), an electrical insulating ceramic with a wide band gap of 6.3 eV, is a potentially useful dielectric material very important in fields such as optoelectronic and micro electronics.

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DETERMINATION OF PHYSICAL RESPONSE IN (Mo/AlN) SAW DEVICES

Caicedo

¹

,

Pérez

²

,

Caicedo

³

et al. 2013

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This paper describes the experimental conditions in surface acoustic wave (SAW) designed on aluminum nitride (AlN) films grown on Si3N4 substrates by using pulsed laser deposition. Moreover it was studied the dependency of optical properties with temperature of deposition. The thickness, measured by profilometry technology, was 150 nm for all films. Moreover, SAW devices with a Mo/AlN/Si3N4 configuration were fabricated employing AlN buffer and Mo Channel. The morphology and composition of the films were studied using atomic force microscopy (AFM), scanning electron microscopy (SEM) and X-ray photoelectron spectroscopy analysis (XPS), respectively. The optical reflectance spectra and color coordinates of the films were obtained by optical spectral reflectometry technique in the range of 400–900 cm-1. In this work, a clear dependence in morphological properties, optical properties, frequency response and acoustic wave velocity as function of applied deposition temperature was found. It was also observed a reduction in reflectance of about 10% and an increase of acoustic wave velocity of about 1.2% when the temperature was increased from 200°C to 630°C.

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Análisis estructural y morfológico de películas de nitruro de aluminio obtenidas por deposición de láser pulsado

Cited by 3 publications

References 7 publications

Research Perspectives on Functional Micro and Nano Scale Coatings

Research Perspectives on Functional Micro and Nano Scale Coatings

Research Perspectives on Functional Micro- and Nanoscale Coatings

DETERMINATION OF PHYSICAL RESPONSE IN (Mo/AlN) SAW DEVICES

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