An XYZ parallel nanopositioning stage with hybrid damping

Chen, Zhong; Qiu, Yuliang; Zhong, Xineng; Zhang, Xianmin

doi:10.1016/j.sna.2024.115688

Sensors and Actuators A: Physical

2024

DOI: 10.1016/j.sna.2024.115688

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An XYZ parallel nanopositioning stage with hybrid damping

Zhong Chen,

Yuliang Qiu,

Xineng Zhong

et al.

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An XYZ parallel nanopositioning stage with hybrid damping

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References 30 publications

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