2015
DOI: 10.1134/s0022476615030245
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An XPS and TPD study of gold oxide films obtained by exposure to RF-activated oxygen

Abstract: Low-temperature oxidation of the polycrystalline surface of bulk metallic gold with radio-frequency activated oxygen is used to obtain oxide films, which are investigated by a combination of X-ray photoelectron spectroscopy (XPS) and temperature programmed desorption (TPD). The XPS estimate for the composition and thickness of the oxide films is close to Au 2 O 3 and is 6-10 nm. The analysis of the Au4f and O1s lines reveals only one state of the oxidized gold, which is described by E b (Au4f) = 85.5 eV, and t… Show more

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Cited by 17 publications
(9 citation statements)
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References 55 publications
(70 reference statements)
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“…None of the Au 4f 7/2 spectra showed any sign of Au oxides. These oxides would be expected around 85.2–86.0 eV (indicated by the yellow region in Figure ). The largest difference can be observed between the spectrum of the clean Au(310) surface and that obtained with 0.5 ML D 2 O­(ads).…”
Section: Resultsmentioning
confidence: 94%
“…None of the Au 4f 7/2 spectra showed any sign of Au oxides. These oxides would be expected around 85.2–86.0 eV (indicated by the yellow region in Figure ). The largest difference can be observed between the spectrum of the clean Au(310) surface and that obtained with 0.5 ML D 2 O­(ads).…”
Section: Resultsmentioning
confidence: 94%
“…In addition, two peaks appeared at 85.00 and 89.19 eV in Figure 3a(iii), which was assigned to ionic Au species (Au δ+ ). [ 41,42 ] These two peaks may be attributed to the bonding between Au and glass. [ 43–45 ] This implies that Au bonded with glass and provided good stability, which agrees with the SEM results.…”
Section: Resultsmentioning
confidence: 99%
“…1 Gold oxides have previously been prepared by oxidation of gold in highly reactive chemical environments, such as reactive sputtering in an oxygen atmosphere, 2,3 ozone, [4][5][6][7] and oxygen plasma. [8][9][10][11][12][13] These oxides have also been prepared using an air corona discharge 14 and via laser deposition in oxygen. 15 The gold oxides that occurred on the gold electrodes of microelectromechanical system (MEMS) devices after the release of organic sacrificial layers caused by exposure to oxygen plasma were also characterized.…”
Section: Introductionmentioning
confidence: 99%
“…X-ray photoelectron spectroscopy (XPS) 27,28 is a useful method for characterization of thin gold oxide layers on gold films. The gold oxides, which were prepared via various methods, all decomposed immediately at higher temperatures, 2,5,[7][8][9]11,13,18,19,21 while they decomposed relatively slowly at room temperature. 9,12 The gold oxides were also found to contain oxygen species other than the gold oxides and these species remained stable at higher temperatures.…”
Section: Introductionmentioning
confidence: 99%