The paper studies the influence of semiconductor structure on microwave oscillation phase stabilization in a nanosecond Gunn oscillator during the modulating voltage pulse rise time. The phase deviation depending on the pulse amplitude and rise time was determined by numerical simulation. The standard deviation of the microwave oscillation phase delay about a fixed level within the modulating pulse rise time and the standard deviation of the microwave oscillation phase difference in two electrodynamically decoupled oscillators were measured.