An Ultrasonic Proximity Sensing Skin for Robot Safety Control by Using Piezoelectric Micromachined Ultrasonic Transducers (PMUTs)

Tong, Zhihao; Hu, Haiyan; Wu, Zhipeng; Xie, Shuxin; Guodong, Cheng; Zhang, Songsong; Lou, Liang; Liu, Huicong

doi:10.1109/jsen.2021.3068487

Cited by 27 publications

(10 citation statements)

References 37 publications

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“…When an obstacle is encountered, the robot will perform 3 stages to avoid collision -detection stage, deceleration stage (acceleration about 0.1m/s^2), and stop stage (stop at a distance of about 100mm from the object). In this way, the avoidance of collision of robots and approaching objects can be accomplished [16]. Another paper proposes a long-range proximity sensor based on capacitive and piezoelectric tactile sensors, which is used in array to make the electronic skin (e-skin) of robots as shown in Figure 17.…”

Section: Collision Prevention and Human-robot Interactionmentioning

confidence: 99%

“…A presumed direction of development is that in the future, there will be more and more hybrid applications of proximity sensors, such as the mixing of capacitive and pressure sensors, ultrasonic and pressure sensors, inductive proximity sensors and capacitive sensors, etc. [4,16,17]. For example, by mixing mentioned electronic detection-based proximity sensors and ultrasonic sensors, it is possible to make the detection of both long-range and close-range objects convenient and reliable.…”

Section: Mixture Usage Of Different Sensorsmentioning

confidence: 99%

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Perspective of Proximity Sensors on Robots Using Cross-Thought

Xing¹

2023

HSET

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Robots play a significantly important role in the area of industry manufacture. In recent years, with the development of intelligence robots, collaborative robots and human-robot interactive robots, proximity sensors applied on robots become increasingly important and popular, since proximity sensors can assure safety during collaboration process between human and robots and help to complete difficult tasks such as objects grasping, objects handover, etc. This article gives the lasted development of proximity sensors and provides an introduction on proximity sensors which are used on robots by their categories. then some concrete applications of the proximity sensors on robots are introduced, such as collision prevention, objects grasping and handover, landing process control of robot legs and so on. In addition, this article also provides some possible future development directions of proximity sensors, such as mixture usage of different proximity sensors, more application scenarios, improvement of data processing method, etc., which can help future researchers to find research directions quickly.

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Section: Collision Prevention and Human-robot Interactionmentioning

confidence: 99%

Section: Mixture Usage Of Different Sensorsmentioning

confidence: 99%

Perspective of Proximity Sensors on Robots Using Cross-Thought

Xing¹

2023

HSET

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“…The process flow of the PMUT array is shown in Figure 2 c–h [ 21 ]. (c) Customize a single-side polishing SOI wafer.…”

Section: Structure and Characterizations Of Pmutsmentioning

confidence: 99%

A Novel Transfer Function Based Ring-Down Suppression System for PMUTs

Liu

Tong

et al. 2021

Sensors

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In this paper, a novel ring-down suppression system based on transfer function is proposed for the first time to suppress the ring-down time and decrease the blind area of PMUTs (Piezoelectric Micromachined Ultrasonic Transducers). This suppression system includes a transfer function and a simple P (proportion) controller, which can reduce the ring-down time without degrading any performances of PMUTs. The transfer function serves as a virtual PMUT device, feeding its output into the P controller; then, the P controller generates a suppression signal to the actual PMUT device. The ring-down time of a 115-kHz PMUT array is demonstrated to be reduced by up to 93% through the suppression system. In addition, the P controller has been experimentally optimized, reducing the blind area of the PMUT array by about 40%. Moreover, a low ring-down PMUTs system design guideline is established, which is practical and straightforward for industrial scenarios. Finally, the system can be easily integrated into ASIC (Application Specific Integrated Circuit).

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“…The PMUTs-based ultrasonic sensors are fabricated by Micro Electro Mechanical System (MEMS) technology, which makes the sensors low cost, physically small, and compatible with the CMOS fabrication process. These features make PMUTs-based ultrasonic sensors easy to integrate with other systems and widely used in gesture recognition [ 21 ], robot safety control [ 22 ], flow meters [ 23 ], and ranging [ 24 ].…”

Section: Introductionmentioning

confidence: 99%

An Ultrasonic Target Detection System Based on Piezoelectric Micromachined Ultrasonic Transducers

Gao

Tong

et al. 2023

Micromachines

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In this paper, an ultrasonic target detection system based on Piezoelectric Micromachined Ultrasonic Transducers (PMUTs) is proposed, which consists of the PMUTs based ultrasonic sensor and the sensor system. Two pieces of 3 × 3 PMUTs arrays with the resonant frequency of 115 kHz are used as transmitter and receiver of the PMUTs-based ultrasonic sensor. Then, the sensor system can calculate the target’s position through the signal received by the above receiver. The static and dynamic performance of the proposed prototype system are characterized on black, white, and transparent targets. The experiment results demonstrated that the proposed system can detect targets of different colors, transparencies, and motion states. In the static experiments, the static location errors of the proposed system in the range of 200 mm to 320 mm are 0.51 mm, 0.50 mm and 0.53 mm, whereas the errors of a commercial laser sensor are 2.89 mm, 0.62 mm, and N\A. In the dynamic experiments, the experimental materials are the targets with thicknesses of 1 mm, 1.5 mm, 2 mm and 2.5 mm, respectively. The proposed system can detect the above targets with a maximum detection error of 4.00%. Meanwhile, the minimum resolution of the proposed system is about 0.5 mm. Finally, in the comprehensive experiments, the proposed system successfully guides a robotic manipulator to realize the detecting, grasping, and moving of a transparent target with 1 mm. This ultrasonic target detection system has demonstrated a cost-effective method to detect targets, especially transparent targets, which can be widely used in the detection and transfer of glass substrates in automated production lines.

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An Ultrasonic Proximity Sensing Skin for Robot Safety Control by Using Piezoelectric Micromachined Ultrasonic Transducers (PMUTs)

Cited by 27 publications

References 37 publications

Perspective of Proximity Sensors on Robots Using Cross-Thought

Perspective of Proximity Sensors on Robots Using Cross-Thought

A Novel Transfer Function Based Ring-Down Suppression System for PMUTs

An Ultrasonic Target Detection System Based on Piezoelectric Micromachined Ultrasonic Transducers

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