2018
DOI: 10.1002/ecj.12138
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An ultrasensitive spintronic strain‐gauge sensor and a spin‐MEMS microphone

Abstract: This review provides the spintronic strain‐gauge sensor (Spin‐SGS) based on a magnetic tunnel junction (MTJ) with a high gauge factor in excess of 5000, which was realized by adopting a novel amorphous Fe‐B‐based sensing layer with high magnetostriction and low coercivity in a high magnetoresistance Mg‐O barrier MTJ. This review also provides a demonstration of novel “Spintronic MEMS (Spin‐MEMS) microphone,” in which a series of Spin‐SGSs are integrated onto a bulk micromachined diaphragm. The Spin‐MEMS microp… Show more

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Cited by 2 publications
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