An ultrahigh‐sensitivity microwave angular displacement sensor with a wide dynamic range

Abstract

A microwave angular displacement sensor with dynamic range up to 180°and ultrahigh sensitivity is designed and fabricated. In the proposed sensor, a stator is designed for reference and a rotatable rotor is attached to it to implement real-time measurement of the rotation angle. As the rotor is attached to the stator, a CSRR-like resonant structure would be formed, with the resonant frequency linearly changing with the angular displacement. The measurement results show that the resonant frequency of the designed angular displacement sensor increases from 2.398 to 6.348 GHz linearly as the angle varies from 0°to 180°, with an excellent sensitivity of 21.94 MHz/°a chieved.