2022
DOI: 10.1016/j.scriptamat.2021.114373
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An oxidation mechanism map for tungsten

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Cited by 17 publications
(9 citation statements)
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“…A compilation of data relating temperature, critical width w * , and oxide phase is provided in table A1 (appendix A.2). These are based on measurements performed by Gulbransen and Andrew [16] and analyzed by Nagy and Humphry-Baker [26]. As the table shows, the WO 2 phase is common to all oxidation conditions, consistent with the expectation that it should be the layer immediately adjacent to the metal substrate 6 .…”
Section: Critical Fragmentation Widthsmentioning
confidence: 54%
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“…A compilation of data relating temperature, critical width w * , and oxide phase is provided in table A1 (appendix A.2). These are based on measurements performed by Gulbransen and Andrew [16] and analyzed by Nagy and Humphry-Baker [26]. As the table shows, the WO 2 phase is common to all oxidation conditions, consistent with the expectation that it should be the layer immediately adjacent to the metal substrate 6 .…”
Section: Critical Fragmentation Widthsmentioning
confidence: 54%
“…In their analysis of oxidation kinetics data, Nagy and Humphry-Baker identified three bands of oxygen partial pressure, low (0.1 atm), medium (0.2 atm), and high (3.4∼13.6 atm). They extracted effective activation energies of 1.22, 1.40, and 1.94 eV for each one [26]. By mapping O partial pressures to oxygen/metal ratio, these can loosely be ascribed to diffusion in WO 2.72 , WO 2.9 , and WO 3 , respectively.…”
Section: Wo 29 and Wo 272 Layersmentioning
confidence: 99%
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“…The thermal analysis curve of multilayer samples in the air also shows an obvious weight gain stage, which starts at 480 °C and ends at 600 °C. This indicates that when the organics are burning in air, the W metal is oxidized, which seriously affects the film resistance performance of the metal circuit [ 29 ]. In the N 2 atmosphere, the thermal analysis curve of the multilayer shows a continuous weight loss of 11.1% from 200 °C to 500 °C.…”
Section: Resultsmentioning
confidence: 99%