An Overview of Mems-Based Micropropulsion Developments at JPL

Mueller, Juergen; Marrese, Colleen M.; Polk, James E.; Yang, Eui–Hyeok; Green, Amanda; White, Victor; Bame, David; Chadraborty, Indrani; Vargo, Stephen

doi:10.1016/s0094-5765(03)00069-9

Cited by 43 publications

(29 citation statements)

References 15 publications

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“…Mueller et al [28] have developed a single-use valve for micro-propulsion applications whose actuation principle is based on a silicon membrane that withstands pressures up to 20 MPa. The main drawback is the high temperature required to melt the membrane (1400 ªC), which is not compatible with many applications.…”

Section: Discussionmentioning

confidence: 99%

A novel single-use SU-8 microvalve for pressure-driven microfluidic applications

Quero¹

2009

J. Micromech. Microeng.

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Abstract.A novel microfluidic single-use valve for fluid injection and extraction in pressuredriven applications is presented in this paper. The device consists in a thin SU-8 membrane crossed by a resistor that withstands a mechanical stress induced by a pressure difference. When the resistor heats up the membrane, the SU-8 fracture strength drastically decreases causing the valve activation. This device has been designed, fabricated using inexpensive SU-8 and Printed Circuit Board technologies, and finally characterized. The hybrid thermalmechanical microvalve operation principle has been demonstrated and experimental results have shown the device characteristics and performance. Specifically, this design was functional at pressures of 0.8 MPa and opened in less than 3.2 seconds with an applied power of 280 mW. The simple fabrication process and the absence of moving mechanical parts have made the valve suitable for large-scale integration in Lab-on-Chip microfluidic platforms.

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Section: Discussionmentioning

confidence: 99%

A novel single-use SU-8 microvalve for pressure-driven microfluidic applications

Quero¹

2009

J. Micromech. Microeng.

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“…This becomes of more importance for microspacecraft because their even higher waiting times demand the limited propellant supply to be conserved during long and inactive interplanetary cruises [7]. Single-use valves are often used in these applications since all multiple-use valves leak to some degree, and a small leakage in a microspacecraft can result in the loss of a significant portion of the propellant [7].…”

Section: Introductionmentioning

confidence: 99%

Manufacturing and characterization of a ceramic single-use microvalve

Khaji

Klintberg

Thornell

2016

J. Micromech. Microeng.

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-Presented here and with foreseen utilization in space applications and other demanding applications, is the manufacturing and characterization of a ceramic single-use microvalve with the potential to be integrated in lab on a chips. A-3 mm diameter membrane was used as the flow barrier, and the opening mechanism was based on cracking the membrane by inducing thermal stresses on it with fast and localized resistive heating.Four manufacturing schemes based on high-temperature co-fired ceramic technology were studied.Three designs for the integrated heaters and two thicknesses of 40 and 120 µm for the membranes were considered, and the heat distribution over their membranes, the required heating energies, their opening mode, and the flows admitted through were compared. Furthermore, the effect of applying +1 and -1 bar pressure difference on the membrane during cracking was investigated.Thick membranes demonstrated unpromising results for low pressure applications since the heating either resulted in microcracks or cracking of the whole chip. Because of the higher pressure tolerance of the thick membranes, the design with microcracks can be considered for high-pressure applications where flow is facilitated anyway.Thin membranes, on the other hand, showed different opening sizes depending on heater design and, consequently, heat distribution over the membranes, from microcracks to holes with the sizes of 3-100% of the membrane area. For all the designs, applying +1 bar over pressure, contributed to bigger openings, whereas -1 bar pressure difference had this influence just for one of the designs and resulted in smaller openings for the other two. The energy required for breaking these membranes was a few hundred mJ with no significant dependence on design and applied pressure.The maximum sustainable pressure of the valve for the current design and thin membranes was 7 bar.

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“…7) Since small satellites have many advantage; relatively low cost and short development time, among other reasons. [8][9][10] Until recently, however, size restrictions and poor power generation of the small satellites have limited the capacity of the available propulsion systems, and these have restricted the capability of the small satellites.…”

Section: Introductionmentioning

confidence: 99%

Thrust Performance of a Low Power Hall Thruster

Yamamoto

Ezaki

Nakashima

2012

AEROSPACE TECHNOLOGY JAPAN

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For the application of Hall thrusters to small satellites, we have been developing a low power Hall thruster. As an initial test, we evaluated the thrust performance of a 50 W class miniature Hall thruster developed at Kyushu University. The outer diameter and the length of the acceleration channel are 18 mm and 7 mm, respectively. A torsional type thrust stand was developed, since the estimated thrust is 1-3 mN, which is too small to be measured by means of a conventional pendulum type thrust stand for Hall thrusts. The uncertainty of this thrust stand is less than 10% at 2 mN with calibration. The thrust, the discharge current, specific impulse and the thrust efficiency at xenon mass flow rate of 0.30 mg/s and discharge voltage of 125 V were 1.7 mN, 0.35 A, 600 sec and 11.4%, respectively. The thrust increased with an increase in discharge voltage and the thrust became 3.1 mN at discharge voltage of 250 V.

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An Overview of Mems-Based Micropropulsion Developments at JPL

Cited by 43 publications

References 15 publications

A novel single-use SU-8 microvalve for pressure-driven microfluidic applications

A novel single-use SU-8 microvalve for pressure-driven microfluidic applications

Manufacturing and characterization of a ceramic single-use microvalve

Thrust Performance of a Low Power Hall Thruster

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