An Overview of Low Vacuum System for the Pressure Range from 1 Pa to 133 Pa

Abstract

Low vacuum has numerous applications especially in the industrial processes where diŠerent gases are mixed under controlled environment. In such cases, the system must have the capability to provide controlled atmosphere which can enhance the quality of the end product. A low vacuum system has been developed by Vacuum Laboratory at Korea Research Institute of Standards and Science (KRISS) that can be used for the generation for stable pressure points in the pressure range from 1 Pa-133 Pa during continuous ‰ow mode. The system's chamber is made of SS 304 and equipped with latest vacuum measuring/regulating instruments like CDGs, MFCs, RGA, RVC etc. This paper describes some established features of the system.