An overview of conventional and new advancements in high kappa thin film deposition techniques in metal oxide semiconductor devices

Devaray, Premdass; Hatta, Sharifah Fatmadiana Wan Muhammad; Wong, Yew Hoong

doi:10.1007/s10854-022-07975-7

Cited by 12 publications

(6 citation statements)

References 232 publications

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“…Additionally, when incorporating PEDOT:PSS as the channel material, our devices not only achieve a high on-state current but also exhibit a superior normalized g m . This dual advantage ensures that it remains competitive and surpasses the performance of numerous state-of-the-art OECTs based on a PEDOT:PSS channel, especially when considering its low-cost material such as chitosan and accessible screen-printing method . For a more comprehensive analysis, a detailed comparison of the electrical performances of various sleeved-glass OECTs is provided in Table .…”

Section: Resultsmentioning

confidence: 99%

Development of Screen-Printed Biodegradable Flexible Organic Electrochemical Transistors Enabled by Poly(3,4-ethylenedioxythiophene) Polystyrene Sulfonate and a Solid-State Chitosan Polymer Electrolyte

Sun,

Wan Muhamad Hatta,

Soin

et al. 2024

ACS Appl. Electron. Mater.

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Organic electrochemical transistors (OECTs) are gaining interest for applications in neuromorphic devices and biosensors. Traditional OECTs use aqueous or ionic gel electrolytes, but these materials often limit performance and wider application due to their fluid nature and poor biocompatibility. This study introduces a biodegradable, flexible solid-state OECT using a chitosan biopolymer electrolyte. The electrolyte consists of chitosan, dextran, and lithium perchlorate (LiClO4)-based salt. The chitosan-based OECTs feature an organic poly(3,4-ethylenedioxythiophene) polystyrene sulfonate semiconductor channel and are fabricated using screen printing. They demonstrate impressive performance, including an on-state current of 0.19 ± 0.03 mA at a low 0.6 V bias voltage, a high on/off current ratio of 0.3 × 103, and a large transconductance of 0.416 ± 0.05 mS. Additionally, these OECTs show remarkable endurance and mechanical robustness, maintaining stability after 300 bending cycles, long-term bending, and under temperatures ranging from 30 to 75 °C. Significantly, the chitosan-based OECTs are biodegradable, breaking down without toxic byproducts and reducing environmental impact. This makes them a promising option for future bioelectronics and wearable technology that leverage natural biomaterials.

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Section: Resultsmentioning

confidence: 99%

Development of Screen-Printed Biodegradable Flexible Organic Electrochemical Transistors Enabled by Poly(3,4-ethylenedioxythiophene) Polystyrene Sulfonate and a Solid-State Chitosan Polymer Electrolyte

Sun,

Wan Muhamad Hatta,

Soin

et al. 2024

ACS Appl. Electron. Mater.

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“…In studying the wear behavior of coatings, it has been noted that the high hardness and wear resistance of EPHC have been the subject of considerable speculation and research over the years, having been attributed to various factors including the hydrogen and oxygen content of the film, small grain size and internal stresses [ 3 , 5 ]. The microstructure of the coating, the orientation and size of grain growth, the thickness of the coating, and the microhardness of the coating are proven to affect the wear resistance of the coating in this paper.…”

Section: Discussionmentioning

confidence: 99%

“…Decorative chromium typically has a thickness of approximately 0.25 μm, while EPHC is a functional coating with a maximum thickness of 500 μm [ 2 ]. It can generally reach tens of microns and is widely used in the field of wear and corrosion resistance to protect parts such as spinning cups, steel collars and other high-speed sliding parts [ 3 , 4 , 5 ]. However, EPHC’s production process poses significant environmental risks, specifically, the generation of hazardous Cr (VI) compounds.…”

Section: Introductionmentioning

confidence: 99%

Comparison to Micro Wear Mechanism of PVD Chromium Coatings and Electroplated Hard Chromium

Yang

Zhang

et al. 2023

Materials

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Electroplated hard chromium (EPHC) has been widely used in industry due to its excellent mechanical properties, but the development of this technology is limited by environmental risks. The physical vapor deposition (PVD) process has shown promise as an alternative to EPHC for producing chromium-based coatings. In this research, we investigate the microstructure and wear resistance of pure chromium coatings using two PVD techniques, namely, magnetron sputtering ion plating (MSIP) and micro-arc ion plating (MAIP), which are compared to EPHC. To assess wear resistance, we evaluated factors such as hardness, coating base bonding force, wear rate and friction coefficient via friction and wear experiments. The results show that, in terms of microstructure, while the EPHC coating does not exhibit a strong preferred growth orientation, the PVD coatings exhibit an obvious preferred growth orientation along the (110) direction. The average grain size of the EPHC coating is the smallest, and the PVD chromium coatings show a higher hardness than the EPHC coating. The results of pin-on-disk tests show that there is little difference in friction coefficients between EPHC and MAIP chromium plating; however, the MAIP chromium coating showed an excellent specific wear rate (as low as 1.477 × 10−13 m3/Nm). The wear condition of the MAIP chromium coating is more stable than that of the EPHC coating, indicating its potential as a replacement for EPHC.

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“…However, the deposition of inorganic materials as thin films with required patterning and within temperature limits poses challenges. Manufacturing processes for these layers can be done with vapor deposition or sol-gel [11]. Physical or chemical vapor deposition, while effective, introduces heightened production costs and complexity with a notable drawback of patterning capabilities crucial for advancing toward higher resolution displays.…”

Section: Introductionmentioning

confidence: 99%

The path to low temperature crack-free high refractive index inorganic thin films

Sadeghi,

Perkins,

Keszler

2024

Oxide-Based Materials and Devices XV

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In optics, inorganic coatings such as TiO2, ZrO2, HfO2, La2O3, and Ta2O5 surpass their organic or hybrid counterparts in terms of performance. They have the highest refractive index and remain unaffected by environmental degradation issues like yellowing. However, existing methods for creating inorganic coatings are limited to two approaches. The first involves costly and time-consuming techniques like physical vapor deposition (PVD) or chemical vapor deposition (CVD). The second approach, sol-gel synthesis, necessitates high temperatures that are incompatible with many substrates, resulting in rough surfaces and cracked samples. Phosio has introduced a platform technology for producing inorganic coatings with tunable refractive indices (ranging from n=1.30 to n=2.35). These coatings possess atomic smoothness and require minimal processing temperatures as low as 150°C. Furthermore, these materials can be cured with UV light and are compatible with nanoimprint lithography, all while maintaining environmental stability. In this manuscript, we share our journey to the process of achieving increased film thickness while ensuring the absence of cracks.

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An overview of conventional and new advancements in high kappa thin film deposition techniques in metal oxide semiconductor devices

Cited by 12 publications

References 232 publications

Development of Screen-Printed Biodegradable Flexible Organic Electrochemical Transistors Enabled by Poly(3,4-ethylenedioxythiophene) Polystyrene Sulfonate and a Solid-State Chitosan Polymer Electrolyte

Development of Screen-Printed Biodegradable Flexible Organic Electrochemical Transistors Enabled by Poly(3,4-ethylenedioxythiophene) Polystyrene Sulfonate and a Solid-State Chitosan Polymer Electrolyte

Comparison to Micro Wear Mechanism of PVD Chromium Coatings and Electroplated Hard Chromium

The path to low temperature crack-free high refractive index inorganic thin films

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