An overview of CMOS-SOI technology and its potential use in particle detection systems

Colinge, Jean–Pierre

doi:10.1016/0168-9002(91)90164-l

Cited by 8 publications

(2 citation statements)

References 5 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…When silicon-on-insulator (SOI) technology emerged, it was considered to provide the ideal structure for monolithic radiation detectors. 2) It provides a thick sensing region in the handle wafer, and complementary metal-oxide-semiconductor (CMOS) circuits can be fabricated in the top Si layer. Research and development studies on monolithic SOI pixel detectors 3) revealed issues that must be solved:…”

Section: Introductionmentioning

confidence: 99%

Silicon-on-insulator monolithic pixel technology for radiation image sensors

Arai

2018

Jpn. J. Appl. Phys.

View full text Add to dashboard Cite

Silicon-on-insulator (SOI) technology provides an optimal structure for realizing monolithic radiation imaging devices as it involves the preparation of a separate thick silicon layer for the sensing region in addition to a circuit layer. However, several difficult issues exist in the use of commercial SOI-CMOS processes to fabricate the imaging devices. We have developed an SOI pixel process based on an 0.2 µm fully-depleted (FD)-SOI CMOS process. To achieve a thick sensing region, we have bonded a high-resistivity floating-zone (FZ) wafer as the handle wafer. Since the device must be radiation-hardened, a new double SOI process technology is developed to improve the radiation hardness to more than 100 kGy(Si) and reduce the coupling between sensors and circuits. The SOI pixel process and sensors we developed are shown.

show abstract

Section: Introductionmentioning

confidence: 99%

Silicon-on-insulator monolithic pixel technology for radiation image sensors

Arai

2018

Jpn. J. Appl. Phys.

View full text Add to dashboard Cite

show abstract

“…1-(b). It was already discussed in 1990 to use the SOI technology for vertex detectors [4]. However, there are several issues to address in order to use the SOI technology for particle detector, and the SOI pixel detector is still not so popular.…”

Section: Introductionmentioning

confidence: 99%